Inventor · disambiguated record
Koji Itadani
Also filed as: ITADANI KOJI
9 granted patents·1 pending application·482 citations·filing 1995–2020
91Inventor score
Top patents by PatentIndex Score
10 records- 0197US6946847B2Impedance matching device provided with reactance-impedance tableDAIHEN CORP·Filed 2003·Granted Sep 20, 2005·219 cites·30 claims
- 0296US10109461B2Plasma processing methodTOKYO ELECTRON LTD·Filed 2017·Granted Oct 23, 2018·41 cites·12 claims
- 0396US9734992B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2012·Granted Aug 15, 2017·43 cites·12 claims
- 0493US9663858B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2014·Granted May 30, 2017·47 cites·9 claims
- 0591US6621372B2Impedance matching deviceDAIHEN CORP·Filed 2002·Granted Sep 16, 2003·60 cites·3 claims
- 0684US5843236APlasma processing apparatus for radiating microwave from rectangular waveguide through long slot to plasma chamberDAIHEN CORP·Filed 1995·Granted Dec 1, 1998·58 cites·13 claims
- 0783US9059680B2Impedance adjusting apparatusDAIHEN CORP·Filed 2013·Granted Jun 16, 2015·8 cites·10 claims
- 0881US11769651B2High-frequency power supply device and output method of high-frequency powerDAIHEN CORP·Filed 2020·Granted Sep 26, 2023·2 cites·6 claims
- 0980US9270250B2High frequency matching systemDAIHEN CORP·Filed 2015·Granted Feb 23, 2016·4 cites·8 claims
- 1040US2019057843A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →