Inventor · disambiguated record
Leon Volfovski
Also filed as: VOLFOVSKI LEON
31 granted patents·12 pending applications·531 citations·filing 1997–2024
97Inventor score
Top patents by PatentIndex Score
43 records- 0198US7925377B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Apr 12, 2011·45 cites·3 claims
- 0298US7743728B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2008·Granted Jun 29, 2010·36 cites·16 claims
- 0398US7694647B2Cluster tool architecture for processing a substrateAPPLIED MATERIALS INC·Filed 2006·Granted Apr 13, 2010·42 cites·19 claims
- 0498US7357842B2Cluster tool architecture for processing a substrateSOKUDO CO LTD·Filed 2005·Granted Apr 15, 2008·106 cites·11 claims
- 0597US7699021B2Cluster tool substrate throughput optimizationSOKUDO CO LTD·Filed 2006·Granted Apr 20, 2010·45 cites·8 claims
- 0696US8146530B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Apr 3, 2012·22 cites·8 claims
- 0795US8550031B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2012·Granted Oct 8, 2013·13 cites·10 claims
- 0894US11823937B2Calibration of an aligner station of a processing systemAPPLIED MATERIALS INC·Filed 2020·Granted Nov 21, 2023·3 cites·20 claims
- 0994US8215262B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted Jul 10, 2012·15 cites·9 claims
- 1094US8181596B2Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2008·Granted May 22, 2012·15 cites·20 claims
- 1192US10964584B2Process kit ring adaptorAPPLIED MATERIALS INC·Filed 2019·Granted Mar 30, 2021·7 cites·20 claims
- 1289US7779527B2Methods and apparatus for installing a scrubber brush on a mandrelAPPLIED MATERIALS INC·Filed 2008·Granted Aug 24, 2010·13 cites·20 claims
- 1388US11211269B2Multi-object capable loadlock systemAPPLIED MATERIALS INC·Filed 2020·Granted Dec 28, 2021·3 cites·20 claims
- 1488US9698074B2Heated substrate support with temperature profile controlAPPLIED MATERIALS INC·Filed 2014·Granted Jul 4, 2017·7 cites·19 claims
- 1588US9538583B2Substrate support with switchable multizone heaterAPPLIED MATERIALS INC·Filed 2013·Granted Jan 3, 2017·9 cites·18 claims
- 1687US5871390AMethod and apparatus for aligning and tensioning a pad/belt used in linear planarization for chemical mechanical polishingLAM RES CORP·Filed 1997·Granted Feb 16, 1999·75 cites·26 claims
- 1786US10242890B2Substrate support with heaterVOLFOVSKI LEON·Filed 2011·Granted Mar 26, 2019·12 cites·20 claims
- 1881US11626305B2Sensor-based correction of robot-held objectAPPLIED MATERIALS INC·Filed 2019·Granted Apr 11, 2023·2 cites·23 claims
- 1977US6454332B1Apparatus and methods for handling a substrateAPPLIED MATERIALS INC·Filed 1998·Granted Sep 24, 2002·51 cites·27 claims
- 2076US7900311B2Wafer edge cleaningAPPLIED MATERIALS INC·Filed 2008·Granted Mar 8, 2011·4 cites·5 claims
- 2176US2025087524A1Process kit enclosure systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 2275US12142503B2Sensor-based correction of robot-held objectAPPLIED MATERIALS INC·Filed 2023·Granted Nov 12, 2024·0 cites·23 claims
- 2372US9698041B2Substrate temperature control apparatus including optical fiber heating, substrate temperature control systems, electronic device processing systems, and methodsAPPLIED MATERIALS INC·Filed 2014·Granted Jul 4, 2017·2 cites·20 claims
- 2471US2024021458A1Calibration of an aligner station of a processing systemAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 2569US9706605B2Substrate support with feedthrough structureAPPLIED MATERIALS INC·Filed 2013·Granted Jul 11, 2017·2 cites·19 claims
- 2666US11842917B2Process kit ring adaptorAPPLIED MATERIALS INC·Filed 2021·Granted Dec 12, 2023·0 cites·20 claims
- 2766US10736182B2Apparatus, systems, and methods for temperature control of substrates using embedded fiber optics and epoxy optical diffusersAPPLIED MATERIALS INC·Filed 2015·Granted Aug 4, 2020·1 cites·9 claims
- 2864US8099817B2Wafer edge cleaningYUDOVSKY JOSEPH·Filed 2011·Granted Jan 24, 2012·1 cites·6 claims
- 2960US2012180983A1Cluster tool architecture for processing a substrateISHIKAWA TETSUYA·Filed 2012·Application pending·0 cites
- 3060US2008223293A1Cluster tool architecture for processing a substrateSOKUDO CO LTD·Filed 2008·Application pending·0 cites
- 3156US12165905B2Process kit enclosure systemAPPLIED MATERIALS INC·Filed 2019·Granted Dec 10, 2024·0 cites·20 claims
- 3254US2009031516A1Methods and apparatus for installing a scrubber brush on a mandrelAPPLIED MATERIALS INC·Filed 2008·Application pending·0 cites
- 3353US10217650B2Methods and apparatus for substrate edge cleaningAPPLIED MATERIALS INC·Filed 2016·Granted Feb 26, 2019·0 cites·13 claims
- 3451US9443714B2Methods and apparatus for substrate edge cleaningAPPLIED MATERIALS INC·Filed 2013·Granted Sep 13, 2016·0 cites·18 claims
- 3549US2005172438A1Methods and apparatus for installing a scrubber brush on a mandrelAPPLIED MATERIALS INC·Filed 2005·Application pending·0 cites
- 3647US11600580B2Replaceable end effector contact pads, end effectors, and maintenance methodsAPPLIED MATERIALS INC·Filed 2020·Granted Mar 7, 2023·0 cites·20 claims
- 3742US9986598B2Temperature control apparatus including groove-routed optical fiber heating, substrate temperature control systems, electronic device processing systems, and processing methodsAPPLIED MATERIALS INC·Filed 2015·Granted May 29, 2018·0 cites·20 claims
- 3842US2005172430A1Wafer edge cleaningFiled 2004·Application pending·0 cites
- 3942US2007254493A1Integrated thermal unit having vertically arranged bake and chill platesAPPLIED MATERIALS INC·Filed 2006·Application pending·0 cites
- 4038US2012055916A1Method and system for thermal treatment of substratesVOLFOVSKI LEON·Filed 2011·Application pending·0 cites
- 4137US2004049870A1Substrate scrubbing apparatus having stationary brush member in contact with edge bevel of rotating substrateAPPLIED MATERIALS INC·Filed 2003·Application pending·0 cites
- 4234US2013087309A1Substrate support with temperature controlVOLFOVSKI LEON·Filed 2011·Application pending·0 cites
- 4332US2012196242A1Substrate support with heater and rapid temperature changeVOLFOVSKI LEON·Filed 2011·Application pending·0 cites
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