Inventor · disambiguated record
Masato Koizumi
Also filed as: KOIZUMI MASATO
5 granted patents·26 citations·filing 1998–2009
75Inventor score
Files withTOKYO ELECTRON LTD5
Top patents by PatentIndex Score
5 records- 0176US7713886B2Film forming apparatus, film forming method, program and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted May 11, 2010·6 cites·18 claims
- 0256US8021717B2Film formation method, cleaning method and film formation apparatusTOKYO ELECTRON LTD·Filed 2009·Granted Sep 20, 2011·0 cites·16 claims
- 0345US6404021B1Laminated structure and a method of forming the sameTOKYO ELECTRON LTD·Filed 1998·Granted Jun 11, 2002·8 cites·8 claims
- 0445US6042653ASusceptor for bearing an object to be processed thereonTOKYO ELECTRON LTD·Filed 1998·Granted Mar 28, 2000·12 cites·9 claims
- 0537US6489208B2Method of forming a laminated structure to enhance metal silicide adhesion on polycrystalline siliconTOKYO ELECTRON LTD·Filed 2002·Granted Dec 3, 2002·0 cites·37 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →