Inventor · disambiguated record
Akifumi Tada
Also filed as: TADA AKIFUMI
5 granted patents·1 pending application·60 citations·filing 1996–2002
79Inventor score
Top patents by PatentIndex Score
6 records- 0172US7065240B2Reticle inspection apparatusNEC CORP·Filed 2002·Granted Jun 20, 2006·15 cites·3 claims
- 0264US5764678AWavelength-stabilized narrow band excimer laserNEC CORP·Filed 1996·Granted Jun 9, 1998·31 cites·13 claims
- 0358US6621847B1Narrow-band excimer laser apparatusUSHIO ELECTRIC INC·Filed 2000·Granted Sep 16, 2003·6 cites·5 claims
- 0454US6754247B2ArF excimer laser devices, KrF excimer laser devices and fluorine alser devicesUSHIO ELECTRIC INC·Filed 2001·Granted Jun 22, 2004·4 cites·15 claims
- 0551US6590921B2Narrow beam ArF excimer laser deviceUSHIO ELECTRIC INC·Filed 2001·Granted Jul 8, 2003·4 cites·3 claims
- 0632US2001052980A1Spectroscope for measuring spectral distributionFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →