Inventor · disambiguated record
Katja Väyrynen
Also filed as: VÄYRYNEN KATJA
13 granted patents·1 pending application·299 citations·filing 2017–2022
88Inventor score
Top patents by PatentIndex Score
14 records- 0198US10731249B2Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatusASM IP HOLDING BV·Filed 2018·Granted Aug 4, 2020·286 cites·24 claims
- 0297US11390946B2Methods of forming a transition metal containing film on a substrate by a cyclical deposition processASM IP HOLDING BV·Filed 2020·Granted Jul 19, 2022·4 cites·20 claims
- 0394US11499222B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2019·Granted Nov 15, 2022·4 cites·19 claims
- 0493US11492703B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2019·Granted Nov 8, 2022·4 cites·18 claims
- 0582US11952658B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2022·Granted Apr 9, 2024·0 cites·20 claims
- 0681US11959171B2Methods of forming a transition metal containing film on a substrate by a cyclical deposition processASM IP HOLDING BV·Filed 2022·Granted Apr 16, 2024·0 cites·20 claims
- 0779US12106965B2Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structuresASM IP HOLDING BV·Filed 2022·Granted Oct 1, 2024·0 cites·19 claims
- 0875US10468261B2Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structuresASM IP HOLDING BV·Filed 2017·Granted Nov 5, 2019·1 cites·20 claims
- 0973US11814715B2Cyclic deposition methods for forming metal-containing material and films and structures including the metal-containing materialASM IP HOLDING BV·Filed 2022·Granted Nov 14, 2023·0 cites·18 claims
- 1072US11410851B2Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structuresASM IP HOLDING BV·Filed 2020·Granted Aug 9, 2022·0 cites·17 claims
- 1167US10741403B2Methods for forming a metallic film on a substrate by cyclical deposition and related semiconductor device structuresASM IP HOLDING BV·Filed 2019·Granted Aug 11, 2020·0 cites·19 claims
- 1266US10468262B2Methods for forming a metallic film on a substrate by a cyclical deposition and related semiconductor device structuresASM IP HOLDING BV·Filed 2019·Granted Nov 5, 2019·0 cites·20 claims
- 1362US12173402B2Method of forming a transition metal containing film on a substrate by a cyclical deposition process, a method for supplying a transition metal halide compound to a reaction chamber, and related vapor deposition apparatusASM IP HOLDING BV·Filed 2020·Granted Dec 24, 2024·0 cites·20 claims
- 1449US2023411153A1Semiconductor doping method and an intermediate semiconductor deviceBENEQ OY·Filed 2021·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →