Inventor · disambiguated record
Marinus Maria Johannes Van De Wal
Also filed as: VAN DE WAL MARINUS MARIA JOHANNES
5 granted patents·1 pending application·4 citations·filing 2011–2022
66Inventor score
Top patents by PatentIndex Score
6 records- 0170US9141004B2Lithographic apparatus and methodVERMEULEN JOHANNES PETRUS MARTINUS BERNARDUS·Filed 2012·Granted Sep 22, 2015·2 cites·20 claims
- 0263US9715182B2Lithographic apparatus, substrate support system, device manufacturing method and control programASML NETHERLANDS BV·Filed 2013·Granted Jul 25, 2017·1 cites·21 claims
- 0357US8854607B2Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing methodKAMIDI RAMIDIN IZAIR·Filed 2011·Granted Oct 7, 2014·1 cites·15 claims
- 0448US2024077380A1A method and system for predicting aberrations in a projection systemASML NETHERLANDS BV·Filed 2022·Application pending·0 cites
- 0545US9383659B2Positioning system, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2013·Granted Jul 5, 2016·0 cites·14 claims
- 0641US10095123B2Control system, positioning system, lithographic apparatus, control method, device manufacturing method and control programASML NETHERLANDS BV·Filed 2015·Granted Oct 9, 2018·0 cites·19 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →