Inventor · disambiguated record
Bu-Fang Chen
Also filed as: CHEN BU-FANG
3 granted patents·50 citations·filing 1997–2002
71Inventor score
Top patents by PatentIndex Score
3 records- 0171US5756392AMethod of formation of polycide in a semiconductor IC deviceTAIWAN SEMICONDUCTOR MANUACTUR·Filed 1997·Granted May 26, 1998·34 cites·6 claims
- 0256US6461979B1LPCVD furnace uniformity improvement by temperature ramp down deposition systemTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Oct 8, 2002·8 cites·9 claims
- 0354US6541339B1Nitride deposition wafer to wafer native oxide uniformity improvement for 0.35 flash erase performance by adding thermal oxide oxidation processTAIWAN SEMICONDUCTOR MFG·Filed 2002·Granted Apr 1, 2003·8 cites·48 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →