Inventor · disambiguated record
Nobuyoshi Sato
Also filed as: SATO NOBUYOSHI
30 granted patents·7 pending applications·440 citations·filing 1978–2021
97Inventor score
Files withLSI LOGIC CORP7KAWASAKI STEEL CO5ASAHI KASEI ENGINEERING CORP4TOSHIBA MEMORY CORP4YOSHIDA HIDEO3
Top patents by PatentIndex Score
37 records- 0189US5090515APassenger transport installation, vehicle for use therein, and method of operating said installationHITACHI LTD·Filed 1990·Granted Feb 25, 1992·51 cites·8 claims
- 0284US5605867AMethod of manufacturing insulating film of semiconductor device and apparatus for carrying out the sameKAWASAKI STEEL CO·Filed 1993·Granted Feb 25, 1997·86 cites·11 claims
- 0381US7857952B2Method for treating the surface of object and apparatus thereofASAHI ENGINEERING·Filed 2007·Granted Dec 28, 2010·6 cites·7 claims
- 0477US7139681B2System for diagnosing facility apparatus, managing apparatus and diagnostic apparatusASAHI KASEI ENGINEERING CORP·Filed 2006·Granted Nov 21, 2006·9 cites·6 claims
- 0576US5532191AMethod of chemical mechanical polishing planarization of an insulating film using an etching stopKAWASAKI STEEL CO·Filed 1994·Granted Jul 2, 1996·60 cites·15 claims
- 0676US5290736AMethod of forming interlayer-insulating film using ozone and organic silanes at a pressure above atmosphericKAWASAKI STEEL CO·Filed 1991·Granted Mar 1, 1994·62 cites·8 claims
- 0773US5336640AMethod of manufacturing a semiconductor device having an insulating layer composed of a BPSG film and a plasma-CVD silicon nitride filmKAWASAKI STEEL CO·Filed 1992·Granted Aug 9, 1994·33 cites·12 claims
- 0870US7143011B2System for diagnosing facility apparatus, managing apparatus and diagnostic apparatusOSAMU YOSHIE·Filed 2006·Granted Nov 28, 2006·8 cites·4 claims
- 0968US6691576B1Thickness measuring device for cylindrical tank bottom plateASAHI ENGINEERING·Filed 2000·Granted Feb 17, 2004·12 cites·6 claims
- 1068US4150975AProcess for producing metallic chromiumTOYO SODA MFG CO LTD·Filed 1978·Granted Apr 24, 1979·12 cites·8 claims
- 1163US11688630B2Shallow trench isolation filling structure in semiconductor deviceMICRON TECHNOLOGY INC·Filed 2021·Granted Jun 27, 2023·0 cites·11 claims
- 1262US7323096B2Method for treating the surface of object and apparatus thereofYOSHIDA HIDEO·Filed 2002·Granted Jan 29, 2008·7 cites·8 claims
- 1361US7513161B2Device for measuring thickness of vessel steel plateASAHI KASEI ENGINEERING CORP·Filed 2003·Granted Apr 7, 2009·5 cites·4 claims
- 1460US7085684B2System for diagnosing a facility apparatusASAHI KASEI ENGINEERING CORP·Filed 2001·Granted Aug 1, 2006·8 cites·9 claims
- 1559US7736442B2Method for activating surface of base material and apparatus thereofYOSHIDA HIDEO·Filed 2007·Granted Jun 15, 2010·0 cites·7 claims
- 1658US5507865AAqueous inkMITSUBISHI CHEM CORP·Filed 1994·Granted Apr 16, 1996·16 cites·8 claims
- 1756US7300527B2Method for activating surface of base material and apparatus thereofYOSHIDA HIDEO·Filed 2002·Granted Nov 27, 2007·1 cites·3 claims
- 1856US2013108736A1Method for improving the quality of bread, etc.ISHIHARA EISUKE·Filed 2011·Application pending·0 cites
- 1954US7854168B2Thickness measuring device for vessel steel plateASAHI KASEI ENGINEERING CORP·Filed 2008·Granted Dec 21, 2010·0 cites·2 claims
- 2053US10816896B2Method for manufacturing imprinting template substrate, imprinting template substrate, imprinting template, and method for manufacturing semiconductor apparatusTOSHIBA MEMORY CORP·Filed 2016·Granted Oct 27, 2020·0 cites·8 claims
- 2153US2014109825A1Equipment and method for producing crystal by vertical boat methodHITACHI METALS LTD·Filed 2013·Application pending·0 cites
- 2252US6156676ALaser marking of semiconductor wafer substrate while inhibiting adherence to substrate surface of particles generated during laser markingLSI LOGIC CORP·Filed 1998·Granted Dec 5, 2000·17 cites·7 claims
- 2351US10359697B2Imprinting template substrate, method for manufacturing the same, imprinting template substrate manufacturing apparatus, and method for manufacturing semiconductor apparatusTOSHIBA MEMORY CORP·Filed 2016·Granted Jul 23, 2019·0 cites·9 claims
- 2450US8435353B2Thin film forming apparatus and methodSATO NOBUYOSHI·Filed 2011·Granted May 7, 2013·0 cites·13 claims
- 2548US2008135981A1Substrate Laser MarkingLSI CORP·Filed 2008·Application pending·0 cites
- 2646US5296037APlasma CVD system comprising plural upper electrodesKAWASAKI STEEL CO·Filed 1992·Granted Mar 22, 1994·9 cites·7 claims
- 2745US7371659B1Substrate laser markingLSI LOGIC CORP·Filed 2001·Granted May 13, 2008·2 cites·14 claims
- 2844US6830775B1Method of manufacturing superconducting quantum interference type magnetic fluxmeterJAPAN SCIENCE & TECH AGENCY·Filed 2003·Granted Dec 14, 2004·4 cites·16 claims
- 2941US2006170076A1Apparatus, system, and method for reducing integrated circuit peelingLSI LOGIC CORP·Filed 2005·Application pending·0 cites
- 3040US2019062905A1Substrate processing device and shielding plateTOSHIBA MEMORY CORP·Filed 2018·Application pending·0 cites
- 3139US6032529ALiquid level sensor for buffered hydrofluoric acidLSI LOGIC CORP·Filed 1999·Granted Mar 7, 2000·11 cites·11 claims
- 3238US10249545B2Method for processing substrate including forming a film on a silicon-containing surface of the substrate to prevent resist from extruding from the substrate during an imprinting processTOSHIBA MEMORY CORP·Filed 2016·Granted Apr 2, 2019·0 cites·11 claims
- 3337US6276379B1Anti-microbubble deposition apparatusLSI LOGIC CORP·Filed 1999·Granted Aug 21, 2001·7 cites·20 claims
- 3436US6248180B1Method for removing particles from a semiconductor waferLSI LOGIC CORP·Filed 1998·Granted Jun 19, 2001·8 cites·14 claims
- 3535US2011143549A1Etching method, method for manufacturing microstructure, and etching apparatusTOSHIBA KK·Filed 2010·Application pending·0 cites
- 3634US6299723B1Anti-airlock apparatus for filtersLSI LOGIC CORP·Filed 1999·Granted Oct 9, 2001·6 cites·14 claims
- 3733US2012137973A1Substrate processing apparatus and film forming systemSATO NOBUYOSHI·Filed 2011·Application pending·0 cites
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