Inventor · disambiguated record
Manabu Amikura
Also filed as: AMIKURA MANABU
7 granted patents·4 pending applications·432 citations·filing 2004–2018
85Inventor score
Top patents by PatentIndex Score
11 records- 0196US7718930B2Loading table and heat treating apparatus having the loading tableTOKYO ELECTRON LTD·Filed 2004·Granted May 18, 2010·380 cites·20 claims
- 0285US7931749B2Shower head and film-forming device using the sameTOKYO ELECTRON LTD·Filed 2004·Granted Apr 26, 2011·30 cites·8 claims
- 0382US7651584B2Processing apparatusTOKYO ELECTRON LTD·Filed 2005·Granted Jan 26, 2010·10 cites·20 claims
- 0478US10094019B2Film forming apparatusTOKYO ELECTRON LTD·Filed 2013·Granted Oct 9, 2018·4 cites·9 claims
- 0575US8143557B2Plane heaterSHIBATA KAZUO·Filed 2007·Granted Mar 27, 2012·8 cites·6 claims
- 0647US10526702B2Film forming apparatusTOKYO ELECTRON LTD·Filed 2016·Granted Jan 7, 2020·0 cites·4 claims
- 0747US2019006207A1Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 0846US2005223987A1Film forming apparatusIWATA TERUO·Filed 2005·Application pending·0 cites
- 0942US10096495B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Oct 9, 2018·0 cites·3 claims
- 1040US2021035823A1Substrate processing deviceTOKYO ELECTRON LTD·Filed 2018·Application pending·0 cites
- 1136US2011283942A1Film forming apparatus and gas injection memberIWATA TERUO·Filed 2011·Application pending·0 cites
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