Inventor · disambiguated record
Robert Rafilevitch Gayazov
Also filed as: GAYAZOV ROBERT RAFILEVITCH
5 granted patents·26 citations·filing 2003–2006
76Inventor score
Files withASML NETHERLANDS BV5
Top patents by PatentIndex Score
5 records- 0165US8018574B2Lithographic apparatus, radiation system and device manufacturing methodASML NETHERLANDS BV·Filed 2005·Granted Sep 13, 2011·2 cites·25 claims
- 0263US7528395B2Radiation source, lithographic apparatus and device manufacturing methodASML NETHERLANDS BV·Filed 2003·Granted May 5, 2009·10 cites·42 claims
- 0362US7208746B2Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2004·Granted Apr 24, 2007·9 cites·9 claims
- 0460US7462851B2Electromagnetic radiation source, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2006·Granted Dec 9, 2008·5 cites·18 claims
- 0537US7335900B2Radiation generating device, lithographic apparatus, device manufacturing method and device manufactured therebyASML NETHERLANDS BV·Filed 2005·Granted Feb 26, 2008·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →