Inventor · disambiguated record
Steffen Hornig
Also filed as: HORNIG STEFFEN
3 granted patents·1 pending application·18 citations·filing 2002–2015
62Inventor score
Top patents by PatentIndex Score
4 records- 0167US9086190B2Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatusFURUSHO TOSHINOBU·Filed 2011·Granted Jul 21, 2015·2 cites·12 claims
- 0267US6797029B2Process facility having at least two physical units each having a reduced density of contaminating particles with respect to the surroundingsINFINEON TECHNOLOGIES AG·Filed 2002·Granted Sep 28, 2004·16 cites·9 claims
- 0346US10035173B2Chemical supply system, substrate treatment apparatus incorporating the same, and coating and developing system incorporating the same apparatusTOKYO ELECTRON LTD·Filed 2015·Granted Jul 31, 2018·0 cites·5 claims
- 0430US2004150074A1Anti-reflective coating (ARC) material, semiconductor product with an ARC layer and method of coating a semiconductor product with an ARC layerFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →