Inventor · disambiguated record
Keith Dawson
Also filed as: DAWSON KEITH · DAWSON KEITH E · DAWSON KEITH EDWARD
11 granted patents·3 pending applications·253 citations·filing 1993–2021
91Inventor score
Top patents by PatentIndex Score
14 records- 0194US6350317B1Linear drive system for use in a plasma processing systemLAM RES CORP·Filed 1999·Granted Feb 26, 2002·78 cites·34 claims
- 0287US6669811B2Linear drive system for use in a plasma processing systemLAM RES CORP·Filed 2001·Granted Dec 30, 2003·20 cites·24 claims
- 0386US5609720AThermal control of semiconductor wafer during reactive ion etchingLAM RES CORP·Filed 1995·Granted Mar 11, 1997·90 cites·17 claims
- 0484US6863784B2Linear drive system for use in a plasma processing systemLAM RES CORP·Filed 2003·Granted Mar 8, 2005·15 cites·33 claims
- 0581US5942074ASingle-piece gas director for plasma reactorsLAM RES CORP·Filed 1996·Granted Aug 24, 1999·36 cites·10 claims
- 0664US8317450B2Tactile wafer lifter and methods for operating the sameDAWSON KEITH E·Filed 2008·Granted Nov 27, 2012·2 cites·18 claims
- 0749US8657556B2Tactile wafer lifter and methods for operating the sameDAWSON KEITH E·Filed 2012·Granted Feb 25, 2014·0 cites·20 claims
- 0847US2023314954A1Dry backside and bevel edge clean of photoresistLAM RES CORP·Filed 2021·Application pending·0 cites
- 0946US8726784B2Field gun aimBAE SYSTEMS PLC·Filed 2012·Granted May 20, 2014·2 cites·6 claims
- 1038USD907882SCounterbalance forklift truckHYSTER YALE GROUP INC·Filed 2019·Granted Jan 12, 2021·2 cites·1 claims
- 1137US2013105078A1Road stud placement and removal systemDAWSON KEITH·Filed 2011·Application pending·0 cites
- 1237US2004187787A1Substrate support having temperature controlled substrate support surfaceFiled 2003·Application pending·0 cites
- 1336US5534062AOil reservoirGORE W L & ASS UK·Filed 1993·Granted Jul 9, 1996·6 cites·6 claims
- 1431US6536777B2Sealing techniques suitable for different geometries and constrained spacesLAM RES CORP·Filed 1999·Granted Mar 25, 2003·2 cites·52 claims
Join the waitlist — get patent alerts
Get an alert when Keith Dawson files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →