Inventor · disambiguated record
Michael A. Purvis
Also filed as: PURVIS MICHAEL · PURVIS MICHAEL A · PURVIS MICHAEL ANTHONY
6 granted patents·1 pending application·17 citations·filing 2014–2024
76Inventor score
Top patents by PatentIndex Score
7 records- 0192US9357625B2Extreme ultraviolet light sourceASML NETHERLANDS BV·Filed 2014·Granted May 31, 2016·11 cites·32 claims
- 0288US11266002B2System for monitoring a plasmaASML NETHERLANDS BV·Filed 2018·Granted Mar 1, 2022·3 cites·29 claims
- 0380US9516729B2Variable radius mirror dichroic beam splitter module for extreme ultraviolet sourceASML NETHERLANDS BV·Filed 2015·Granted Dec 6, 2016·3 cites·20 claims
- 0466US12171053B2System for monitoring a plasmaASML NETHERLANDS BV·Filed 2022·Granted Dec 17, 2024·0 cites·20 claims
- 0566US2025126698A1Euv collector for an euv projection exposure apparatusZEISS CARL SMT GMBH·Filed 2024·Application pending·0 cites
- 0656US10210963B2Method of improving measurement of energy of extreme ultraviolet radiation generated in a chamberASML NETHERLANDS BV·Filed 2016·Granted Feb 19, 2019·0 cites·12 claims
- 0754US9546901B2Minimizing grazing incidence reflections for reliable EUV power measurements having a light source comprising plural tubes with centerlines disposed between a radiation region and corresponding photodetector modulesASML NETHERLANDS BV·Filed 2014·Granted Jan 17, 2017·0 cites·21 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →