Inventor · disambiguated record
Yasuo Kiyohara
Also filed as: KIYOHARA YASUO
5 granted patents·2 pending applications·11 citations·filing 2014–2023
72Inventor score
Files withTOKYO ELECTRON LTD7
Top patents by PatentIndex Score
7 records- 0177US10796897B2Supercritical fluid producing apparatus and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Oct 6, 2020·3 cites·5 claims
- 0277US10593571B2Substrate processing apparatusTOKYO ELECTRON LTD·Filed 2017·Granted Mar 17, 2020·3 cites·4 claims
- 0373US11482427B2Substrate processing system and method for supplying processing fluidTOKYO ELECTRON LTD·Filed 2019·Granted Oct 25, 2022·1 cites·11 claims
- 0469US11735439B2Substrate processing system and method for supplying processing fluidTOKYO ELECTRON LTD·Filed 2022·Granted Aug 22, 2023·0 cites·8 claims
- 0565US10067514B2Substrate processing apparatus and liquid mixing methodTOKYO ELECTRON LTD·Filed 2014·Granted Sep 4, 2018·4 cites·9 claims
- 0651US2023260807A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2023·Application pending·0 cites
- 0737US2018096863A1Substrate processing method, substrate processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2017·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →