Inventor · disambiguated record

Fandayani Soesilo

Also filed as: SOESILO FANDAYANI

2 granted patents·11 citations·filing 2000–2001

57Inventor score

Technology areasH10P

Files withLAM RES CORP2

Top patents by PatentIndex Score

2 records

0156US6225234B1In situ and ex situ hardmask process for STI with oxide collar applicationLAM RES CORP·Filed 2000·Granted May 1, 2001·6 cites·34 claims
0254US6649996B2In situ and ex situ hardmask process for STI with oxide collar applicationLAM RES CORP·Filed 2001·Granted Nov 18, 2003·5 cites·20 claims

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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →