Inventor · disambiguated record
Alan J. Miller
Also filed as: MILLER ALAN · MILLER ALAN J · MILLER ALAN JEFFREY · MILLER ALAN ROBERT
22 granted patents·4 pending applications·501 citations·filing 1998–2021
95Inventor score
Top patents by PatentIndex Score
26 records- 0194US6218309B1Method of achieving top rounding and uniform etch depths while etching shallow trench isolation featuresLAM RES CORP·Filed 1999·Granted Apr 17, 2001·177 cites·33 claims
- 0292US6344105B1Techniques for improving etch rate uniformityLAM RES CORP·Filed 1999·Granted Feb 5, 2002·141 cites·29 claims
- 0389US11112773B2Systems for removing and replacing consumable parts from a semiconductor process module in situLAM RES CORP·Filed 2017·Granted Sep 7, 2021·5 cites·18 claims
- 0484US6287974B1Method of achieving top rounding and uniform etch depths while etching shallow trench isolation featuresLAM RES CORP·Filed 1999·Granted Sep 11, 2001·75 cites·28 claims
- 0575US6939811B2Apparatus and method for controlling etch depthLAM RES CORP·Filed 2002·Granted Sep 6, 2005·17 cites·16 claims
- 0674US7605063B2Photoresist stripping chamber and methods of etching photoresist on substratesLAM RES CORP·Filed 2006·Granted Oct 20, 2009·5 cites·20 claims
- 0769US7682980B2Method to improve profile control and N/P loading in dual doped gate applicationsLAM RES CORP·Filed 2007·Granted Mar 23, 2010·3 cites·10 claims
- 0866US8871105B2Method for achieving smooth side walls after Bosch etch processWINNICZEK JAROSLAW W·Filed 2012·Granted Oct 28, 2014·2 cites·19 claims
- 0966US6432832B1Method of improving the profile angle between narrow and wide featuresLAM RES CORP·Filed 1999·Granted Aug 13, 2002·35 cites·35 claims
- 1064US7204934B1Method for planarization etch with in-situ monitoring by interferometry prior to recess etchLAM RES CORP·Filed 2001·Granted Apr 17, 2007·10 cites·23 claims
- 1160US7098141B1Use of silicon containing gas for CD and profile feature enhancements of gate and shallow trench structuresLAM RES CORP·Filed 2003·Granted Aug 29, 2006·7 cites·31 claims
- 1258US7186661B2Method to improve profile control and N/P loading in dual doped gate applicationsLAM RES CORP·Filed 2003·Granted Mar 6, 2007·6 cites·3 claims
- 1356US6225234B1In situ and ex situ hardmask process for STI with oxide collar applicationLAM RES CORP·Filed 2000·Granted May 1, 2001·6 cites·34 claims
- 1456US2017115657A1Systems for Removing and Replacing Consumable Parts from a Semiconductor Process Module in SituLAM RES CORP·Filed 2015·Application pending·0 cites
- 1554US7425277B1Method for hard mask CD trimLAM RES CORP·Filed 2003·Granted Sep 16, 2008·4 cites·17 claims
- 1654US6649996B2In situ and ex situ hardmask process for STI with oxide collar applicationLAM RES CORP·Filed 2001·Granted Nov 18, 2003·5 cites·20 claims
- 1752US9543225B2Systems and methods for detecting endpoint for through-silicon via reveal applicationsLAM RES CORP·Filed 2014·Granted Jan 10, 2017·0 cites·17 claims
- 1852US7667281B2Method for hard mask CD trimLAM RES CORP·Filed 2007·Granted Feb 23, 2010·0 cites·13 claims
- 1951US2022108875A1Multi-location gas injection to improve uniformity in rapid alternating processesLAM RES CORP·Filed 2020·Application pending·0 cites
- 2049US9941178B2Methods for detecting endpoint for through-silicon via reveal applicationsLAM RES CORP·Filed 2016·Granted Apr 10, 2018·0 cites·16 claims
- 2149US7316785B2Methods and apparatus for the optimization of etch resistance in a plasma processing systemLAM RES CORP·Filed 2004·Granted Jan 8, 2008·3 cites·25 claims
- 2249US2023223292A1Flat bottom shadow ringLAM RES CORP·Filed 2021·Application pending·0 cites
- 2343US11041227B2Process for recovering gold from oresBROMINE COMPOUNDS LTD·Filed 2017·Granted Jun 22, 2021·0 cites·17 claims
- 2440US8609548B2Method for providing high etch rateXU QING·Filed 2011·Granted Dec 17, 2013·0 cites·12 claims
- 2535US2002146779A1Methods for production of recombinant polypeptidesFiled 2000·Application pending·0 cites
- 2627US6162910AProcess for preparing lipophilic oligosaccharide antibioticsSCHERING CORP·Filed 1998·Granted Dec 19, 2000·0 cites·12 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →