Inventor · disambiguated record
Ikuhisa Morioka
Also filed as: MORIOKA IKUHISA
7 granted patents·11 pending applications·37 citations·filing 2002–2025
82Inventor score
Technology areasH10P
Top patents by PatentIndex Score
18 records- 0191US11610798B2Electrostatic chuck assembly, electrostatic chuck, and focus ringNGK INSULATORS LTD·Filed 2020·Granted Mar 21, 2023·3 cites·3 claims
- 0285US8136820B2Electrostatic chuck with heater and manufacturing method thereofMORIOKA IKUHISA·Filed 2007·Granted Mar 20, 2012·16 cites·3 claims
- 0378US11282734B2Electrostatic chuck and method for manufacturing the sameNGK INSULATORS LTD·Filed 2019·Granted Mar 22, 2022·2 cites·8 claims
- 0478US7763831B2Heating deviceNGK INSULATORS LTD·Filed 2007·Granted Jul 27, 2010·6 cites·11 claims
- 0578US2025336655A1Wafer placement tableNGK INSULATORS LTD·Filed 2025·Application pending·0 cites
- 0672US7576967B2Electrostatic chuckNGK INSULATORS LTD·Filed 2007·Granted Aug 18, 2009·4 cites·5 claims
- 0769US12444586B2Wafer placement tableNGK INSULATORS LTD·Filed 2023·Granted Oct 14, 2025·0 cites·6 claims
- 0858US2025079230A1Wafer placement table and method of using the sameNGK INSULATORS LTD·Filed 2024·Application pending·0 cites
- 0955US6728091B2Electrostatic adsorption deviceNGK INSULATORS LTD·Filed 2002·Granted Apr 27, 2004·6 cites·18 claims
- 1055US2023317430A1Wafer placement tableNGK INSULATORS LTD·Filed 2023·Application pending·0 cites
- 1153US2023170191A1Wafer placement tableNGK INSULATORS LTD·Filed 2022·Application pending·0 cites
- 1253US2023144107A1Wafer placement tableNGK INSULATORS LTD·Filed 2022·Application pending·0 cites
- 1353US2023146815A1Wafer placement tableNGK INSULATORS LTD·Filed 2022·Application pending·0 cites
- 1451US2024120216A1Method of adjusting heat uniformity on wafer mount and method of manufacturing wafer mountNGK INSULATORS LTD·Filed 2023·Application pending·0 cites
- 1550US2024162016A1Wafer placement tableNGK INSULATORS LTD·Filed 2023·Application pending·0 cites
- 1646US2009159588A1Heating apparatusNGK INSULATORS LTD·Filed 2008·Application pending·0 cites
- 1744US2008062612A1Electrostatic chuckNGK INSULATORS LTD·Filed 2007·Application pending·0 cites
- 1841US2007146961A1Electrostatic chuckNGK INSULATORS LTD·Filed 2006·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →