Inventor · disambiguated record
Yong-Woo Heo
Also filed as: HEO YONG-WOO
5 granted patents·1 pending application·47 citations·filing 1999–2003
80Inventor score
Technology areasH10P
Files withSAMSUNG ELECTRONICS CO LTD5
Top patents by PatentIndex Score
6 records- 0170US6613693B1Etchant used in the manufacture of semiconductor devices and etching method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2000·Granted Sep 2, 2003·14 cites·4 claims
- 0259US6960265B2Apparatus and method for collecting metallic impurity on a semiconductor waferSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Nov 1, 2005·10 cites·20 claims
- 0353US6548419B2Wet etching system for manufacturing semiconductor devices and wet etching method using the sameSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Apr 15, 2003·5 cites·5 claims
- 0451US7081182B2Method and apparatus for automatically measuring the concentration of TOC in a fluid used in a semiconductor manufacturing processSAMSUNG ELECTRONICS CO LTD·Filed 2002·Granted Jul 25, 2006·5 cites·5 claims
- 0546US6398904B1Wet etching system for manufacturing semiconductor devicesSAMSUNG ELECTRONICS CO LTD·Filed 1999·Granted Jun 4, 2002·13 cites·10 claims
- 0637US2003203632A1Etchant used in the manufacture of semiconductor devices and etching method using the sameFiled 2003·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →