Inventor · disambiguated record
Yuta Takeda
Also filed as: TAKEDA YUTA
6 granted patents·6 pending applications·4 citations·filing 2010–2023
69Inventor score
Top patents by PatentIndex Score
12 records- 0188US10156012B2Cleaning method, method of manufacturing semiconductor device, substrate processing apparatus, and a non-transitory computer-readable recording mediumHITACHI INT ELECTRIC INC·Filed 2017·Granted Dec 18, 2018·3 cites·15 claims
- 0270US10926211B2Method for purifying fluorine compound gasCENTRAL GLASS CO LTD·Filed 2017·Granted Feb 23, 2021·1 cites·13 claims
- 0355US12145857B2Method for producing tungsten hexafluorideCENTRAL GLASS CO LTD·Filed 2019·Granted Nov 19, 2024·0 cites·20 claims
- 0450US2015047680A1Method for Dry-Cleaning Metal Film in Film-Formation ApparatusCENTRAL GLASS CO LTD·Filed 2013·Application pending·0 cites
- 0544US8562751B2Dry cleaning method of substrate processing apparatusGUNJI ISAO·Filed 2012·Granted Oct 22, 2013·0 cites·19 claims
- 0644US2013333729A1Dry Cleaning MethodUMEZAKI TOMONORI·Filed 2012·Application pending·0 cites
- 0743US2025325906A1Replay system, processing method, and replay programTAKEDA YUTA·Filed 2023·Application pending·0 cites
- 0841US2014352716A1Dry etching method, dry etching apparatus, metal film, and device including the metal filmCENTRAL GLASS CO LTD·Filed 2014·Application pending·0 cites
- 0940US2013221024A1Halogen-containing gas supply apparatus and halogen-containing gas supply methodYAO AKIFUMI·Filed 2011·Application pending·0 cites
- 1037US10754944B2Processing system, and processing method and programTAKEDA YUTA·Filed 2016·Granted Aug 25, 2020·0 cites·3 claims
- 1131US2019047858A1Method for Purifying Fluorine GasCENTRAL GLASS CO LTD·Filed 2017·Application pending·0 cites
- 1227US8213274B2Optical disc reproducing methodTAKEDA YUTA·Filed 2010·Granted Jul 3, 2012·0 cites·9 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →