Inventor · disambiguated record
Jr-Sheng Chen
Also filed as: CHEN JR-SHENG
12 granted patents·5 pending applications·9 citations·filing 2016–2025
84Inventor score
Files withTAIWAN SEMICONDUCTOR MFG CO LTD17
Top patents by PatentIndex Score
17 records- 0188US10529578B2Method of fabricating semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Jan 7, 2020·5 cites·22 claims
- 0283US2025343033A1Baffle plate for controlling wafer uniformity and methods for making the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0382US2025343031A1Devices and methods for controlling wafer uniformity in plasma-based processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2025·Application pending·0 cites
- 0480US11615946B2Baffle plate for controlling wafer uniformity and methods for making the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 28, 2023·2 cites·20 claims
- 0574US12412734B2Baffle plate for controlling wafer uniformity and methods for making the sameTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Sep 9, 2025·0 cites·20 claims
- 0673US9997336B2Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDPTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Jun 12, 2018·2 cites·20 claims
- 0772US12463016B2Devices and methods for controlling wafer uniformity in plasma-based processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Nov 4, 2025·0 cites·20 claims
- 0868US2024363312A1Methods and systems for cooling plasma treatment componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2024·Application pending·0 cites
- 0968US2023386799A1Focus ring for a plasma-based semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2023·Application pending·0 cites
- 1065US12062523B2Methods and systems for cooling plasma treatment componentsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2022·Granted Aug 13, 2024·0 cites·20 claims
- 1163US10654713B2Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widthsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted May 19, 2020·0 cites·20 claims
- 1261US10964547B2Method of fabricating semiconductor structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Mar 30, 2021·0 cites·20 claims
- 1360US11769652B2Devices and methods for controlling wafer uniformity in plasma-based processTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2019·Granted Sep 26, 2023·0 cites·18 claims
- 1458US10273152B2Method for manufacturing microelectromechanical system structure having a cavity and through-holes of different widthsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Apr 30, 2019·0 cites·20 claims
- 1558US2023066418A1Focus ring for a plasma-based semiconductor processing toolTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2021·Application pending·0 cites
- 1649US10957516B2Multi-zone gas distribution plate (GDP) and a method for designing the multi-zone GDPTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Mar 23, 2021·0 cites·20 claims
- 1747US10131539B2Method for forming micro-electro-mechanical system (MEMS) device structureTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Nov 20, 2018·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →