Inventor · disambiguated record
Holger Seitz
Also filed as: SEITZ HOLGER
14 granted patents·1 pending application·22 citations·filing 2004–2021
87Inventor score
Top patents by PatentIndex Score
15 records- 0189US10928332B2Inspection device for masks for semiconductor lithography and methodZEISS CARL SMT GMBH·Filed 2018·Granted Feb 23, 2021·3 cites·28 claims
- 0283US10168539B2Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unitZEISS CARL AG·Filed 2018·Granted Jan 1, 2019·3 cites·12 claims
- 0383US9904060B2Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unitZEISS CARL AG·Filed 2014·Granted Feb 27, 2018·5 cites·38 claims
- 0478US8730474B2Method and apparatus for measuring of masks for the photo-lithographySCHERUEBL THOMAS·Filed 2009·Granted May 20, 2014·7 cites·25 claims
- 0572US10698318B2Method and device for characterizing a mask for microlithographyZEISS CARL SMT GMBH·Filed 2018·Granted Jun 30, 2020·1 cites·19 claims
- 0670US10788748B2Method and appliance for predicting the imaging result obtained with a mask when a lithography process is carried outZEISS CARL SMT GMBH·Filed 2018·Granted Sep 29, 2020·1 cites·26 claims
- 0769US11867642B2Inspection device for masks for semiconductor lithography and methodZEISS CARL SMT GMBH·Filed 2021·Granted Jan 9, 2024·0 cites·24 claims
- 0868US9222897B2Method for characterizing a feature on a mask and device for carrying out the methodSEITZ HOLGER·Filed 2011·Granted Dec 29, 2015·2 cites·27 claims
- 0964US10578881B2Illumination optical unit for a metrology system and metrology system comprising such an illumination optical unitZEISS CARL AG·Filed 2018·Granted Mar 3, 2020·0 cites·20 claims
- 1054US11619882B2Method and apparatus for characterizing a microlithographic maskZEISS CARL SMT GMBH·Filed 2021·Granted Apr 4, 2023·0 cites·20 claims
- 1152US10539865B2Method and device for determining an OPC modelZEISS CARL SMT GMBH·Filed 2017·Granted Jan 21, 2020·0 cites·24 claims
- 1248US9268124B2Microscope and method for characterizing structures on an objectZEISS CARL SMS GMBH·Filed 2013·Granted Feb 23, 2016·0 cites·18 claims
- 1343US9535244B2Emulation of reproduction of masks corrected by local density variationsZEISS CARL SMT GMBH·Filed 2015·Granted Jan 3, 2017·0 cites·20 claims
- 1437US8970951B2Mask inspection microscope with variable illumination settingMATEJKA ULRICH·Filed 2010·Granted Mar 3, 2015·0 cites·51 claims
- 1525US2006269117A1Method for analysis of objects in microlithographySEITZ HOLGER·Filed 2004·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →