Inventor · disambiguated record
Maarten Van Kampen
Also filed as: VAN KAMPEN MAARTEN
9 granted patents·7 pending applications·49 citations·filing 2009–2024
86Inventor score
Files withASML NETHERLANDS BV10YAKUNIN ANDREI MIKHAILOVICH2EHM DIRK HEINRICH1JAK MARTIN JACOBUS JOHAN1SCACCABAROZZI LUIGI1
Top patents by PatentIndex Score
16 records- 0194US9482960B2Pellicle for reticle and multilayer mirrorASML NETHERLANDS BV·Filed 2014·Granted Nov 1, 2016·14 cites·13 claims
- 0292US10359710B2Radiation system and optical deviceASML NETHERLANDS BV·Filed 2016·Granted Jul 23, 2019·5 cites·21 claims
- 0392US9395630B2Lithographic apparatus and methodYAKUNIN ANDREI MIKHAILOVICH·Filed 2011·Granted Jul 19, 2016·13 cites·16 claims
- 0490US9989844B2Pellicle for reticle and multilayer mirrorASML NETHERLANDS BV·Filed 2016·Granted Jun 5, 2018·5 cites·13 claims
- 0587US10481510B2Graphene spectral purity filterASML NETHERLANDS BV·Filed 2018·Granted Nov 19, 2019·3 cites·27 claims
- 0684US9606445B2Lithographic apparatus and method of manufacturing a deviceASML NETHERLANDS BV·Filed 2013·Granted Mar 28, 2017·5 cites·21 claims
- 0770US9773578B2Radiation source-collector and method for manufactureASML NETHERLANDS BV·Filed 2014·Granted Sep 26, 2017·3 cites·17 claims
- 0869US2024353315A1Apparatus and method for cleaning an inspection systemASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0968US9354529B2Arrangement for use in a projection exposure tool for microlithography having a reflective optical elementEHM DIRK HEINRICH·Filed 2012·Granted May 31, 2016·1 cites·12 claims
- 1064US12055478B2Apparatus and method for cleaning an inspection systemASML NETHERLANDS BV·Filed 2021·Granted Aug 6, 2024·0 cites·20 claims
- 1147US2011037960A1Lithographic apparatus, device manufacturing method, cleaning system and method for cleaning a patterning deviceASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 1240US2021079519A1Method and apparatus for forming a patterned layer of materialASML NETHERLANDS BV·Filed 2019·Application pending·0 cites
- 1339US2012200913A1Reflective optical element and method of producing itVAN KAMPEN MAARTEN·Filed 2012·Application pending·0 cites
- 1437US2010151394A1System for Contactless Cleaning, Lithographic Apparatus and Device Manufacturing MethodSCACCABAROZZI LUIGI·Filed 2009·Application pending·0 cites
- 1532US2013114059A1Components for EUV Lithographic Apparatus, EUV Lithographic Apparatus Including Such Components and Method for Manufacturing Such ComponentsJAK MARTIN JACOBUS JOHAN·Filed 2011·Application pending·0 cites
- 1629US2012170015A1Spectral purity filter, lithographic apparatus, method for manufacturing a spectral purity filter and method of manufacturing a device using lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →