Inventor · disambiguated record
Guangyun Zhang
Also filed as: ZHANG GUANGYUN
12 granted patents·39 citations·filing 2009–2012
87Inventor score
Top patents by PatentIndex Score
12 records- 0186US8492277B2Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitrideGUO YI·Filed 2010·Granted Jul 23, 2013·9 cites·18 claims
- 0285US8025813B2Chemical mechanical polishing composition and methods relating theretoROHM & HAAS ELECT MAT·Filed 2009·Granted Sep 27, 2011·11 cites·10 claims
- 0379US8790160B2Chemical mechanical polishing composition and method for polishing phase change alloysLEE JAESEOK·Filed 2011·Granted Jul 29, 2014·4 cites·8 claims
- 0479US8513126B2Slurry composition having tunable dielectric polishing selectivity and method of polishing a substrateLIU ZHENDONG·Filed 2010·Granted Aug 20, 2013·5 cites·9 claims
- 0579US8431490B2Method of chemical mechanical polishing a substrate with polishing composition adapted to enhance silicon oxide removalGUO YI·Filed 2010·Granted Apr 30, 2013·5 cites·3 claims
- 0674US8232208B2Stabilized chemical mechanical polishing composition and method of polishing a substrateGUO YI·Filed 2010·Granted Jul 31, 2012·3 cites·10 claims
- 0765US8444728B2Stabilized chemical mechanical polishing composition and method of polishing a substrateGUO YI·Filed 2012·Granted May 21, 2013·1 cites·8 claims
- 0861US8309468B1Chemical mechanical polishing composition and method for polishing germanium-antimony-tellurium alloysLEE JAESEOK·Filed 2011·Granted Nov 13, 2012·1 cites·8 claims
- 0937US8568610B2Stabilized, concentratable chemical mechanical polishing composition and method of polishing a substrateLIU ZHENDONG·Filed 2010·Granted Oct 29, 2013·0 cites·7 claims
- 1037US8496843B2Method of polishing a substrate comprising polysilicon and at least one of silicon oxide and silicon nitrideGUO YI·Filed 2010·Granted Jul 30, 2013·0 cites·18 claims
- 1136US8491808B2Method of polishing a substrate comprising polysilicon, silicon oxide and silicon nitrideGUO YI·Filed 2010·Granted Jul 23, 2013·0 cites·20 claims
- 1234US8865013B2Method for chemical mechanical polishing tungstenGUO YI·Filed 2011·Granted Oct 21, 2014·0 cites·16 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →