Inventor · disambiguated record
Shuitsu Fujii
Also filed as: FUJII SHUITSU
6 granted patents·1 pending application·293 citations·filing 1997–2013
86Inventor score
Files withADTEC CORP LIMITED2ADTEC PLASMA TECH CO LTD1ADTEC PLASMA TECHNOLOGY CO LTD1HITACHI INT ELECTRIC INC1MAX PLANCK GESELLSCHAFT1
Top patents by PatentIndex Score
7 records- 0193US7683342B2Plasma sourceMAX PLANCK GESELLSCHAFT·Filed 2006·Granted Mar 23, 2010·47 cites·18 claims
- 0293US5936481ASystem for impedance matching and power control for apparatus for high frequency plasma treatmentADTEC CORP LIMITED·Filed 1998·Granted Aug 10, 1999·126 cites·4 claims
- 0389US6080271APlasma source for generating inductively coupled, plate-shaped plasma, having magnetically permeable coreADTEC CORP LIMITED·Filed 1997·Granted Jun 27, 2000·81 cites·2 claims
- 0471US7514377B2Plasma generator, ozone generator, substrate processing apparatus and manufacturing method of semiconductor deviceHITACHI INT ELECTRIC INC·Filed 2003·Granted Apr 7, 2009·27 cites·21 claims
- 0568US7858899B2Coaxial microwave plasma torchADTEC PLASMA TECHNOLOGY CO LTD·Filed 2005·Granted Dec 28, 2010·12 cites·6 claims
- 0635US2009317294A1Method of low-temperature dry sterilization and apparatus thereforSATO TAKEHIKO·Filed 2005·Application pending·0 cites
- 0733US9526160B2Cavity resonator of microwave plasma generating apparatusADTEC PLASMA TECH CO LTD·Filed 2013·Granted Dec 20, 2016·0 cites·18 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →