Inventor · disambiguated record
Takaharu Komiya
Also filed as: KOMIYA TAKAHARU
4 granted patents·2 pending applications·28 citations·filing 2006–2009
74Inventor score
Top patents by PatentIndex Score
6 records- 0184US7382527B2EUV multilayer mirror with phase shifting layerNIKON CORP·Filed 2006·Granted Jun 3, 2008·17 cites·20 claims
- 0270US7706058B2Multilayer mirror, method for manufacturing the same, and exposure equipmentNIKON CORP·Filed 2008·Granted Apr 27, 2010·4 cites·4 claims
- 0369US8121254B2Optical element, exposure apparatus using this, and device manufacturing methodMURAKAMI KATSUHIKO·Filed 2009·Granted Feb 21, 2012·6 cites·15 claims
- 0464US7440182B2Multilayer mirror, method for manufacturing the same, and exposure equipmentNIKON CORP·Filed 2007·Granted Oct 21, 2008·1 cites·6 claims
- 0549US2008266651A1Optical apparatus, multilayer-film reflective mirror, exposure apparatus, and deviceMURAKAMI KATSUHIKO·Filed 2008·Application pending·0 cites
- 0644US2008268380A1Optical apparatus, multilayer-film reflective mirror, exposure apparatus, and deviceMURAKAMI KATSUHIKO·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →