Inventor · disambiguated record
William George Petro
Also filed as: PETRO WILLIAM G · PETRO WILLIAM GEORGE
8 granted patents·1 pending application·294 citations·filing 1985–2022
87Inventor score
Top patents by PatentIndex Score
9 records- 0196US11976361B2Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatusASM IP HOLDING BV·Filed 2022·Granted May 7, 2024·2 cites·14 claims
- 0295US11306395B2Methods for depositing a transition metal nitride film on a substrate by atomic layer deposition and related deposition apparatusASM IP HOLDING BV·Filed 2017·Granted Apr 19, 2022·7 cites·14 claims
- 0391US5326723AMethod for improving stability of tungsten chemical vapor depositionINTEL CORP·Filed 1992·Granted Jul 5, 1994·146 cites·10 claims
- 0482US4762728ALow temperature plasma nitridation process and applications of nitride films formed therebyFAIRCHILD SEMICONDUCTOR·Filed 1985·Granted Aug 9, 1988·70 cites·34 claims
- 0576US5260236AUV transparent oxynitride deposition in single wafer PECVD systemINTEL CORP·Filed 1992·Granted Nov 9, 1993·63 cites·10 claims
- 0668US12467140B2Showerhead assembly and componentsASM IP HOLDING BV·Filed 2021·Granted Nov 11, 2025·0 cites·20 claims
- 0759US2023029724A1System and method for monitoring precursor delivery to a process chamberASM IP HOLDING BV·Filed 2022·Application pending·0 cites
- 0846US11830731B2Semiconductor deposition reactor manifoldsASM IP HOLDING BV·Filed 2020·Granted Nov 28, 2023·0 cites·18 claims
- 0930US6645353B2Approach to optimizing an ILD argon sputter processINTEL CORP·Filed 1997·Granted Nov 11, 2003·6 cites·10 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →