Inventor · disambiguated record

Ta-Yu Lo

Also filed as: LO TA-YU

1 granted patent·0 citations·filing 2018–2018

6Inventor score

Technology areasH10P

Files withLAM RES AG1

Top patents by PatentIndex Score

1 record

0135US11854792B2Systems and methods for preventing stiction of high aspect ratio structures and/or repairing high aspect ratio structuresLAM RES AG·Filed 2018·Granted Dec 26, 2023·0 cites·18 claims

Join the waitlist — get patent alerts

Get an alert when Ta-Yu Lo files or is granted a new patent.

We store only your email — no account needed. See our privacy policy.

Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →