Inventor · disambiguated record
Alexey Sergeevich Kuznetsov
Also filed as: KUZNETSOV ALEXEY · KUZNETSOV ALEXEY SERGEEVICH
7 granted patents·2 pending applications·27 citations·filing 2014–2024
80Inventor score
Top patents by PatentIndex Score
9 records- 0197US10228615B2Membranes for use within a lithographic apparatus and a lithographic apparatus comprising such a membraneASML NETHERLANDS BV·Filed 2015·Granted Mar 12, 2019·17 cites·28 claims
- 0291US11340532B2Prolonging optical element lifetime in an EUV lithography systemASML NETHERLANDS BV·Filed 2019·Granted May 24, 2022·5 cites·29 claims
- 0384US11846887B2Prolonging optical element lifetime in an EUV lithography systemASML NETHERLANDS BV·Filed 2022·Granted Dec 19, 2023·1 cites·25 claims
- 0479US2024369920A1Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2024·Application pending·0 cites
- 0570US9773578B2Radiation source-collector and method for manufactureASML NETHERLANDS BV·Filed 2014·Granted Sep 26, 2017·3 cites·17 claims
- 0669US2024160109A1Prolonging optical element lifetime in an euv lithography systemASML NETHERLANDS BV·Filed 2023·Application pending·0 cites
- 0763US10690812B2Optical element and optical system for EUV lithography, and method for treating such an optical elementZEISS CARL SMT GMBH·Filed 2015·Granted Jun 23, 2020·1 cites·17 claims
- 0861US12072620B2Method of manufacturing a membrane assemblyASML NETHERLANDS BV·Filed 2019·Granted Aug 27, 2024·0 cites·20 claims
- 0953US11099484B2Method for repairing reflective optical elements for EUV lithographyZEISS CARL SMT GMBH·Filed 2019·Granted Aug 24, 2021·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →