Inventor · disambiguated record
Toshifumi Sohara
Also filed as: SOHARA TOSHIFUMI
2 granted patents·7 citations·filing 2006–2012
51Inventor score
Top patents by PatentIndex Score
2 records- 0173US7676296B2Substrate processing system, substrate processing method and computer-readable storage medium storing verification programTOKYO ELECTRON LTD·Filed 2006·Granted Mar 9, 2010·5 cites·4 claims
- 0254US8774491B2Substrate processing apparatus, substrate processing method, and computer-readable recording medium having program for executing the substrate processing method recorded thereinSEKI SHINICHI·Filed 2012·Granted Jul 8, 2014·2 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →