Inventor · disambiguated record
Nobutaka Fukunaga
Also filed as: FUKUNAGA NOBUTAKA
6 granted patents·2 pending applications·4 citations·filing 2012–2025
69Inventor score
Top patents by PatentIndex Score
8 records- 0181US12290898B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted May 6, 2025·1 cites·6 claims
- 0267US2025332683A1Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2025·Application pending·0 cites
- 0365US10274843B2Exposure apparatus, exposure method and storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Apr 30, 2019·1 cites·7 claims
- 0454US8774491B2Substrate processing apparatus, substrate processing method, and computer-readable recording medium having program for executing the substrate processing method recorded thereinSEKI SHINICHI·Filed 2012·Granted Jul 8, 2014·2 cites·13 claims
- 0549US12194594B2Substrate processing method and substrate processing apparatusTOKYO ELECTRON LTD·Filed 2020·Granted Jan 14, 2025·0 cites·10 claims
- 0647US12377519B2Substrate processing apparatus and substrate processing methodTOKYO ELECTRON LTD·Filed 2019·Granted Aug 5, 2025·0 cites·18 claims
- 0738US10527948B2Optical processing apparatus, coating/development apparatus, optical processing method, and non-transitory computer-readable storage mediumTOKYO ELECTRON LTD·Filed 2017·Granted Jan 7, 2020·0 cites·18 claims
- 0836US2021362290A1Processing apparatus, processing method and computer- readable recording mediumTOKYO ELECTRON LTD·Filed 2019·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →