Inventor · disambiguated record
Radhika Mani
Also filed as: MANI RADHIKA · MANI RADHIKA C
8 granted patents·1 pending application·50 citations·filing 2004–2020
85Inventor score
Top patents by PatentIndex Score
9 records- 0191US9230819B2Internal plasma grid applications for semiconductor fabrication in context of ion-ion plasma processingLAM RES CORP·Filed 2014·Granted Jan 5, 2016·15 cites·30 claims
- 0290US9633846B2Internal plasma grid applications for semiconductor fabricationLAM RES CORP·Filed 2015·Granted Apr 25, 2017·8 cites·23 claims
- 0386US9305797B2Polysilicon over-etch using hydrogen diluted plasma for three-dimensional gate etchAPPLIED MATERIALS INC·Filed 2014·Granted Apr 5, 2016·8 cites·14 claims
- 0478US10658174B2Atomic layer deposition and etch for reducing roughnessLAM RES CORP·Filed 2017·Granted May 19, 2020·3 cites·12 claims
- 0571US8722547B2Etching high K dielectrics with high selectivity to oxide containing layers at elevated temperatures with BC13 based etch chemistriesMANI RADHIKA·Filed 2007·Granted May 13, 2014·5 cites·11 claims
- 0670US8133817B2Shallow trench isolation etch processSASANO HIROKI·Filed 2008·Granted Mar 13, 2012·7 cites·23 claims
- 0760US11170997B2Atomic layer deposition and etch for reducing roughnessLAM RES CORP·Filed 2020·Granted Nov 9, 2021·0 cites·14 claims
- 0859US9533332B2Methods for in-situ chamber clean utilized in an etching processing chamberSUN NOEL·Filed 2012·Granted Jan 3, 2017·4 cites·14 claims
- 0945US2005260119A1Carbon nanopipettes methods of making and applicationsSUNKARA MAHENDRA K·Filed 2004·Application pending·0 cites
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