Inventor · disambiguated record
Yoshiki Aruga
Also filed as: ARUGA YOSHIKI
5 granted patents·1 pending application·277 citations·filing 1995–2009
85Inventor score
Top patents by PatentIndex Score
6 records- 0191US6251232B1Method of removing accumulated films from the surface of substrate holders in film deposition apparatus, and film deposition apparatusANELVA CORP·Filed 2000·Granted Jun 26, 2001·64 cites·27 claims
- 0288US5846328AIn-line film deposition systemANELVA CORP·Filed 1996·Granted Dec 8, 1998·137 cites·14 claims
- 0378US6027618ACompact in-line film deposition systemANELVA CORP·Filed 1997·Granted Feb 22, 2000·49 cites·17 claims
- 0477US7944677B2Electrostatic chuckCANON ANELVA CORP·Filed 2008·Granted May 17, 2011·7 cites·14 claims
- 0553US5560586AMain valveANELVA CORP·Filed 1995·Granted Oct 1, 1996·20 cites·14 claims
- 0650US2010096262A1Electrostatic chuckCANON ANELVA CORP·Filed 2009·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →