Inventor · disambiguated record
Kazuaki Himukai
Also filed as: HIMUKAI KAZUAKI
5 granted patents·220 citations·filing 1995–2005
84Inventor score
Technology areasH10P
Top patents by PatentIndex Score
5 records- 0192US5679059APolishing aparatus and methodEBARA CORP·Filed 1995·Granted Oct 21, 1997·110 cites·83 claims
- 0282US5704827APolishing apparatus including cloth cartridge connected to turntableEBARA CORP·Filed 1995·Granted Jan 6, 1998·67 cites·20 claims
- 0378US6997782B2Polishing apparatus and a method of polishing and cleaning and drying a waferTOSHIBA KK·Filed 2002·Granted Feb 14, 2006·16 cites·20 claims
- 0470US7198552B2Polishing apparatusTOSHIBA KK·Filed 2005·Granted Apr 3, 2007·2 cites·18 claims
- 0567US6500051B1Polishing apparatus and methodEBARA CORP·Filed 1997·Granted Dec 31, 2002·25 cites·57 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →