Inventor · disambiguated record
Riichiro Aoki
Also filed as: AOKI RIICHIRO
10 granted patents·338 citations·filing 1995–2007
91Inventor score
Technology areasH10P
Top patents by PatentIndex Score
10 records- 0192US5679059APolishing aparatus and methodEBARA CORP·Filed 1995·Granted Oct 21, 1997·110 cites·83 claims
- 0282US5704827APolishing apparatus including cloth cartridge connected to turntableEBARA CORP·Filed 1995·Granted Jan 6, 1998·67 cites·20 claims
- 0379US5827110APolishing facilityTOSHIBA KK·Filed 1995·Granted Oct 27, 1998·64 cites·21 claims
- 0478US6997782B2Polishing apparatus and a method of polishing and cleaning and drying a waferTOSHIBA KK·Filed 2002·Granted Feb 14, 2006·16 cites·20 claims
- 0570US7198552B2Polishing apparatusTOSHIBA KK·Filed 2005·Granted Apr 3, 2007·2 cites·18 claims
- 0670US5846335AMethod for cleaning workpieceEBARA CORP·Filed 1997·Granted Dec 8, 1998·40 cites·39 claims
- 0767US6500051B1Polishing apparatus and methodEBARA CORP·Filed 1997·Granted Dec 31, 2002·25 cites·57 claims
- 0857US7708618B2Method and apparatus for dry-in, dry-out polishing and washing of a semiconductor deviceEBARA CORP·Filed 2007·Granted May 4, 2010·0 cites·6 claims
- 0952US6595220B2Apparatus for conveying a workpieceEBARA CORP·Filed 2001·Granted Jul 22, 2003·3 cites·13 claims
- 1046US6221171B1Method and apparatus for conveying a workpieceEBARA CORP·Filed 1997·Granted Apr 24, 2001·11 cites·13 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →