Inventor · disambiguated record
Denis Alexandrovich Glushkov
Also filed as: GLUSHKOV DENIS · GLUSHKOV DENIS ALEXANDROVICH
13 granted patents·7 pending applications·48 citations·filing 2007–2023
87Inventor score
Top patents by PatentIndex Score
20 records- 0194US10964523B1Laser-pumped plasma light source and method for light generationRND ISAN LTD·Filed 2020·Granted Mar 30, 2021·8 cites·22 claims
- 0294US9476841B1High-brightness LPP EUV light sourceISTEQ B V·Filed 2016·Granted Oct 25, 2016·22 cites·17 claims
- 0389US9897930B2Optical element comprising oriented carbon nanotube sheet and lithographic apparatus comprising such optical elementSJMAENOK LEONID AIZIKOVITCH·Filed 2009·Granted Feb 20, 2018·14 cites·18 claims
- 0472US11869742B2X-ray source with rotating liquid-metal targetEUV LABS LTD·Filed 2020·Granted Jan 9, 2024·1 cites·13 claims
- 0563US9448492B2Multilayer mirror, method of producing a multilayer mirror and lithographic apparatusYAKUNIN ANDREI MIKHAILOVICH·Filed 2012·Granted Sep 20, 2016·2 cites·12 claims
- 0658US11875986B2Laser-pumped light source and method for laser ignition of plasmaRND ISAN LTD·Filed 2022·Granted Jan 16, 2024·0 cites·14 claims
- 0756US9082521B2EUV multilayer mirror with interlayer and lithographic apparatus using the mirrorGLUSHKOV DENIS ALEXANDROVICH·Filed 2010·Granted Jul 14, 2015·1 cites·15 claims
- 0854US11503696B2Broadband laser-pumped plasma light sourceRND ISAN LTD·Filed 2021·Granted Nov 15, 2022·0 cites·20 claims
- 0952US11191147B2High-brightness laser-pumped plasma light sourceRND ISAN LTD·Filed 2021·Granted Nov 30, 2021·0 cites·20 claims
- 1051US9964852B1Source collector apparatus, lithographic apparatus and methodASML NETHERLANDS BV·Filed 2017·Granted May 8, 2018·0 cites·7 claims
- 1149US2024121878A1High brightness lpp euv light source with fast rotating target and method of cooling thereofISTEQ GROUP HOLDING B V·Filed 2023·Application pending·0 cites
- 1247US2011080573A1Multilayer mirror and lithographic apparatusASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 1346US9841680B2Source collector apparatus, lithographic apparatus and methodASML NETHERLANDS BV·Filed 2014·Granted Dec 12, 2017·0 cites·9 claims
- 1446US8454849B2Imprint lithographyWUISTER SANDER FREDERIK·Filed 2011·Granted Jun 4, 2013·0 cites·8 claims
- 1540US2010328639A1Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filterASML NETHERLANDS BV·Filed 2010·Application pending·0 cites
- 1640US2010141909A1Radiation system and lithographic apparatusASML NETHERLANDS BV·Filed 2007·Application pending·0 cites
- 1737US2012147350A1Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filterYAKUNIN ANDREI·Filed 2010·Application pending·0 cites
- 1836US2013015373A1EUV Radiation Source and EUV Radiation Generation MethodASML NETHERLANDS BV·Filed 2011·Application pending·0 cites
- 1936US2011043777A1Target material, a source, an euv lithographic apparatus and a device manufacturing method using the sameASML NETHERLANDS BV·Filed 2009·Application pending·0 cites
- 2033US9307624B2Lithographic apparatusGLUSHKOV DENIS ALEXANDROVICH·Filed 2009·Granted Apr 5, 2016·0 cites·15 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →