Inventor · disambiguated record
Naonori Kita
Also filed as: KITA NAONORI
11 granted patents·6 pending applications·16 citations·filing 2005–2021
85Inventor score
Top patents by PatentIndex Score
17 records- 0180US10025194B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2016·Granted Jul 17, 2018·1 cites·15 claims
- 0276US9513558B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2014·Granted Dec 6, 2016·1 cites·38 claims
- 0376US8749759B2Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2012·Granted Jun 10, 2014·1 cites·30 claims
- 0474US9551938B2Light source optimizing method, exposure method, device manufacturing method, program, exposure apparatus, lithography system, light source evaluation method, and light source modulation methodMATSUYAMA TOMOYUKI·Filed 2012·Granted Jan 24, 2017·3 cites·38 claims
- 0569US9389519B2Measuring method and measuring apparatus of pupil transmittance distribution, exposure method and exposure apparatus, and device manufacturing methodKITA NAONORI·Filed 2011·Granted Jul 12, 2016·2 cites·22 claims
- 0669US7618767B2Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure methodNIKON CORP·Filed 2006·Granted Nov 17, 2009·2 cites·51 claims
- 0765US2018348643A1Exposure apparatus, exposure method, and method for producing deviceNIKON CORP·Filed 2018·Application pending·0 cites
- 0864US9581811B2Method for evaluating and improving pupil luminance distribution, illumination optical system and adjustment method thereof, exposure apparatus, exposure method, and device manufacturing methodNIKON CORP·Filed 2013·Granted Feb 28, 2017·1 cites·49 claims
- 0964US7706072B2Optical integrator, illumination optical device, photolithograph, photolithography, and method for fabricating deviceNIKON CORP·Filed 2005·Granted Apr 27, 2010·2 cites·38 claims
- 1059US8587764B2Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing methodKITA NAONORI·Filed 2008·Granted Nov 19, 2013·3 cites·20 claims
- 1154US2024416449A1Data generation method, cloud system, processing apparatus, computer program, and recording mediumNIKON CORP·Filed 2021·Application pending·0 cites
- 1251US2025155236A1Optical device and inspection methodNIKON CORP·Filed 2021·Application pending·0 cites
- 1347US2010002219A1Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure methodNIKON CORP·Filed 2009·Application pending·0 cites
- 1444US2008225257A1Optical integrator system, illumination optical apparatus, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2008·Application pending·0 cites
- 1541US8638420B2Optical integrator, illuminating optical device, exposure apparatus and device manufacturing methodKITA NAONORI·Filed 2008·Granted Jan 28, 2014·0 cites·19 claims
- 1640US9122170B2Transmission optical system, illumination optical system, exposure apparatus, and device manufacturing methodKITA NAONORI·Filed 2011·Granted Sep 1, 2015·0 cites·12 claims
- 1737US2010316943A1Illumination optical system, exposure apparatus, and device manufacturing methodNIKON CORP·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →