Inventor · disambiguated record
Clifford Owen Morgan, Iii
Also filed as: MORGAN CLIFFORD O · MORGAN CLIFFORD OWEN · MORGAN III CLIFFORD O · MORGAN III CLIFFORD OWEN
20 granted patents·1 pending application·1,029 citations·filing 1995–2001
96Inventor score
Files withIBM20
Top patents by PatentIndex Score
21 records- 0198US6126848AIndirect endpoint detection by chemical reaction and chemiluminescenceIBM·Filed 1998·Granted Oct 3, 2000·485 cites·13 claims
- 0294US6110832AMethod and apparatus for slurry polishingIBM·Filed 1999·Granted Aug 29, 2000·157 cites·18 claims
- 0389US5876266APolishing pad with controlled release of desired micro-encapsulated polishing agentsIBM·Filed 1997·Granted Mar 2, 1999·84 cites·33 claims
- 0485US5658185AChemical-mechanical polishing apparatus with slurry removal system and methodIBM·Filed 1995·Granted Aug 19, 1997·70 cites·25 claims
- 0578US6228280B1Endpoint detection by chemical reaction and reagentIBM·Filed 1998·Granted May 8, 2001·51 cites·9 claims
- 0672US6114249AChemical mechanical polishing of multiple material substrates and slurry having improved selectivityIBM·Filed 1998·Granted Sep 5, 2000·42 cites·5 claims
- 0771US6276987B1Chemical mechanical polishing endpoint process controlIBM·Filed 1998·Granted Aug 21, 2001·32 cites·35 claims
- 0866US6440263B1Indirect endpoint detection by chemical reaction and chemiluminescenceIBM·Filed 2000·Granted Aug 27, 2002·8 cites·5 claims
- 0961US5877589AGas discharge devices including matrix materials with ionizable gas filled sealed cavitiesIBM·Filed 1997·Granted Mar 2, 1999·14 cites·24 claims
- 1052US6254453B1Optimization of chemical mechanical process by detection of oxide/nitride interface using CLD systemIBM·Filed 1999·Granted Jul 3, 2001·17 cites·6 claims
- 1150US6419785B1Endpoint detection by chemical reactionIBM·Filed 2000·Granted Jul 16, 2002·2 cites·5 claims
- 1247US6261851B1Optimization of CMP process by detecting of oxide/nitride interface using IR systemIBM·Filed 1999·Granted Jul 17, 2001·12 cites·15 claims
- 1346US6066564AIndirect endpoint detection by chemical reactionIBM·Filed 1998·Granted May 23, 2000·12 cites·15 claims
- 1442US6021679AProbe for slurry gas samplingIBM·Filed 1998·Granted Feb 8, 2000·11 cites·12 claims
- 1541US6228769B1Endpoint detection by chemical reaction and photoionizationIBM·Filed 1998·Granted May 8, 2001·8 cites·8 claims
- 1638US6180422B1Endpoint detection by chemical reactionIBM·Filed 1998·Granted Jan 30, 2001·5 cites·14 claims
- 1736US6506341B2Chemiluminescence detection apparatusIBM·Filed 1998·Granted Jan 14, 2003·6 cites·7 claims
- 1836US6194230B1Endpoint detection by chemical reaction and light scatteringIBM·Filed 1998·Granted Feb 27, 2001·5 cites·19 claims
- 1933US6251784B1Real-time control of chemical-mechanical polishing processing by monitoring ionization currentIBM·Filed 1998·Granted Jun 26, 2001·3 cites·19 claims
- 2033US6176765B1Accumulator for slurry samplingIBM·Filed 1999·Granted Jan 23, 2001·5 cites·9 claims
- 2132US2003206114A1Interface device for sti/bpsg EPD and real time controlFiled 2001·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →