Inventor · disambiguated record
Thorsten Kril
Also filed as: KRIL THORSTEN
8 granted patents·4 pending applications·36 citations·filing 2008–2025
82Inventor score
Top patents by PatentIndex Score
12 records- 0184US8572155B2Virtual sensorsYANOVICH ALEKSEY·Filed 2008·Granted Oct 29, 2013·26 cites·22 claims
- 0280US8473247B2Methods for monitoring processing equipmentCRUSE JAMES P·Filed 2010·Granted Jun 25, 2013·5 cites·20 claims
- 0375US2024419151A1Communication node to interface between evaluation systems and a manufacturing systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0473US2024176328A1Communication node to interface between evaluation systems and a manufacturing systemAPPLIED MATERIALS INC·Filed 2024·Application pending·0 cites
- 0572US9910430B2K-nearest neighbor-based method and system to provide multi-variate analysis on tool process dataAPPLIED MATERIALS INC·Filed 2013·Granted Mar 6, 2018·3 cites·20 claims
- 0668US11892821B2Communication node to interface between evaluation systems and a manufacturing systemAPPLIED MATERIALS INC·Filed 2022·Granted Feb 6, 2024·0 cites·19 claims
- 0765US11487304B2Process fluid path switching in recipe operationsAPPLIED MATERIALS INC·Filed 2021·Granted Nov 1, 2022·0 cites·20 claims
- 0864US11714430B2Process fluid path switching in recipe operationsAPPLIED MATERIALS INC·Filed 2022·Granted Aug 1, 2023·0 cites·19 claims
- 0962US10409272B2Method and apparatus to automatically create virtual sensors with templatesAPPLIED MATERIALS INC·Filed 2014·Granted Sep 10, 2019·1 cites·20 claims
- 1053US2025076097A1Systems and methods for detecting malfunctions within a gas distribution systemAPPLIED MATERIALS INC·Filed 2023·Application pending·0 cites
- 1151US2025327185A1Fail-safe control in substrate processing systemsAPPLIED MATERIALS INC·Filed 2025·Application pending·0 cites
- 1246US8812261B2Method and apparatus to automatically create virtual sensors with templatesKROUPNOVA NATALIA·Filed 2008·Granted Aug 19, 2014·1 cites·18 claims
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