Inventor · disambiguated record
Yuan-Chih Chu
Also filed as: CHU YUAN-CHIH
23 granted patents·32 citations·filing 2012–2018
92Inventor score
Top patents by PatentIndex Score
23 records- 0194US9835940B2Method to fabricate mask-pellicle systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Dec 5, 2017·5 cites·20 claims
- 0285US8900777B2Apparatus and method for lithography patterningTAIWAN SEMICONDUCTOR MFG·Filed 2012·Granted Dec 2, 2014·4 cites·20 claims
- 0384US8819859B1Apparatus of analyzing a sample and a method for the sameTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Aug 26, 2014·6 cites·20 claims
- 0482US8921015B2Mask repair with passivationTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Dec 30, 2014·4 cites·20 claims
- 0581US9274417B2Method for lithography patterningTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Mar 1, 2016·3 cites·20 claims
- 0678US10061193B2Focused radiation beam induced depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2018·Granted Aug 28, 2018·2 cites·20 claims
- 0778US9134602B2Method of manufacturing an extreme ultraviolet (EUV) mask and the mask manufactured therefromTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2013·Granted Sep 15, 2015·2 cites·20 claims
- 0877US9659768B2Focused radiation beam induced thin film depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted May 23, 2017·3 cites·20 claims
- 0976US9029050B2Method for repairing a maskTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted May 12, 2015·2 cites·20 claims
- 1072US9952503B2Method for repairing a maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Apr 24, 2018·1 cites·20 claims
- 1161US10859908B2Method to fabricate mask-pellicle systemTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Dec 8, 2020·0 cites·20 claims
- 1257US9400424B2Method of repairing a maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Jul 26, 2016·0 cites·20 claims
- 1356US9395632B2Efficient solution for removing EUV native defectsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Jul 19, 2016·0 cites·20 claims
- 1456US9291890B2Method for repairing a maskTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Mar 22, 2016·0 cites·20 claims
- 1555US9664995B2Method of manufacturing an extreme ultraviolet (EUV) mask and the mask manufactured therefromTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted May 30, 2017·0 cites·20 claims
- 1655US9494855B2Lithography-oriented photomask repairTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2014·Granted Nov 15, 2016·0 cites·21 claims
- 1754US9810978B2Method for lithography patterningTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Nov 7, 2017·0 cites·20 claims
- 1853US9298085B2Method for repairing a maskTAIWAN SEMICONDUCTOR MFG·Filed 2013·Granted Mar 29, 2016·0 cites·20 claims
- 1952US9759998B2Efficient solution for removing EUV native defectsTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2016·Granted Sep 12, 2017·0 cites·20 claims
- 2049US9915866B2Focused radiation beam induced depositionTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 13, 2018·0 cites·20 claims
- 2149US9910350B2Method for repairing a maskTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Mar 6, 2018·0 cites·20 claims
- 2247US10816891B2Photomask and fabrication method thereforTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2017·Granted Oct 27, 2020·0 cites·20 claims
- 2341US9625808B2Durable metal film deposition for mask repairTAIWAN SEMICONDUCTOR MFG CO LTD·Filed 2015·Granted Apr 18, 2017·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →