Inventor · disambiguated record
Shinji Utamura
Also filed as: UTAMURA SHINJI
7 granted patents·118 citations·filing 1987–2005
86Inventor score
Files withCANON KK7
Top patents by PatentIndex Score
7 records- 0182US5925887AProjection exposure apparatus including an optical characteristic detector for detecting a change in optical characteristic of a projection optical system and device manufacturing method using the sameCANON KK·Filed 1997·Granted Jul 20, 1999·50 cites·43 claims
- 0281US6980872B2Information providing method and systemCANON KK·Filed 2001·Granted Dec 27, 2005·25 cites·4 claims
- 0370US7225041B2Information providing method and systemCANON KK·Filed 2005·Granted May 29, 2007·2 cites·39 claims
- 0460US5095190AExposure apparatusCANON KK·Filed 1990·Granted Mar 10, 1992·17 cites·24 claims
- 0555US4811059AAlignment methodCANON KK·Filed 1987·Granted Mar 7, 1989·12 cites·9 claims
- 0644US4881100AAlignment methodCANON KK·Filed 1988·Granted Nov 14, 1989·7 cites·9 claims
- 0735US5710624AAligner and contamination detecting methodCANON KK·Filed 1995·Granted Jan 20, 1998·5 cites·12 claims
Join the waitlist — get patent alerts
Get an alert when Shinji Utamura files or is granted a new patent.
We store only your email — no account needed. See our privacy policy.
Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →