Inventor · disambiguated record
Daiki Yamatani
Also filed as: YAMATANI DAIKI
4 granted patents·3 pending applications·9 citations·filing 2004–2022
65Inventor score
Top patents by PatentIndex Score
7 records- 0164US8841625B2Method for the detection of the irradiance distribution in an extreme ultraviolet light source device and an extreme ultraviolet light source deviceYAMATANI DAIKI·Filed 2011·Granted Sep 23, 2014·3 cites·5 claims
- 0252US8785893B2Extreme ultraviolet light source and positioning method of light focusing optical meansYAMATANI DAIKI·Filed 2011·Granted Jul 22, 2014·1 cites·4 claims
- 0352US6982421B2Extreme ultraviolet sourceUSHIO ELECTRIC INC·Filed 2004·Granted Jan 3, 2006·5 cites·4 claims
- 0442US2010123086A1Extreme ultraviolet light source deviceUSHIO ELECTRIC INC·Filed 2009·Application pending·0 cites
- 0534US2023049650A1Storage and drainage mechanism, light source apparatus, and storage and drainage methodUSHIO ELECTRIC INC·Filed 2022·Application pending·0 cites
- 0631US10609802B2High-temperature plasma raw material supply apparatus and extreme ultra violet light source apparatusUSHIO ELECTRIC INC·Filed 2017·Granted Mar 31, 2020·0 cites·10 claims
- 0730US2013010282A1Illuminance distribution detection method in extreme ultraviolet light source apparatus and positioning method of light focusing optical meansUSHIO ELECTRIC INC·Filed 2011·Application pending·0 cites
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