Assignee
YAMATANI DAIKI
JP·2 granted patents·4 citations·filing 2011–2011
Top patents by PatentIndex Score
2 records- 0164US8841625B2Method for the detection of the irradiance distribution in an extreme ultraviolet light source device and an extreme ultraviolet light source deviceYAMATANI DAIKI·Filed 2011·Granted Sep 23, 2014·3 cites·5 claims
- 0252US8785893B2Extreme ultraviolet light source and positioning method of light focusing optical meansYAMATANI DAIKI·Filed 2011·Granted Jul 22, 2014·1 cites·4 claims
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