Inventor · disambiguated record
Mayuka Iwasaki
Also filed as: IWASAKI MAYUKA
6 granted patents·42 citations·filing 2006–2012
80Inventor score
Top patents by PatentIndex Score
6 records- 0191US7269287B2Method and apparatus for measuring dimension using electron microscopeHITACHI HIGH TECH CORP·Filed 2006·Granted Sep 11, 2007·23 cites·6 claims
- 0283US7460714B2Method and apparatus for measuring dimension using electron microscopeHITACHI HIGH TECH CORP·Filed 2007·Granted Dec 2, 2008·10 cites·15 claims
- 0375US8217348B2Electron microscope system and method for evaluating film thickness reduction of resist patternsIWASAKI MAYUKA·Filed 2009·Granted Jul 10, 2012·4 cites·12 claims
- 0466US7817860B2Method and apparatus for measuring dimension using electron microscopeHITACHI HIGH TECH CORP·Filed 2008·Granted Oct 19, 2010·3 cites·6 claims
- 0564US8357897B2Charged particle beam deviceHITACHI HIGH TECH CORP·Filed 2010·Granted Jan 22, 2013·2 cites·10 claims
- 0651US8502145B2Electron microscope system and method for evaluating film thickness reduction of resist patternsIWASAKI MAYUKA·Filed 2012·Granted Aug 6, 2013·0 cites·20 claims
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →