Inventor · disambiguated record
Kenji Tago
Also filed as: TAGO KENJI
6 granted patents·3 pending applications·488 citations·filing 1994–2012
86Inventor score
Top patents by PatentIndex Score
9 records- 0194US5556275AHeat treatment apparatusTOKYO ELECTRON LTD·Filed 1994·Granted Sep 17, 1996·389 cites·19 claims
- 0282US6344387B1Wafer boat and film formation methodTOKYO ELECTRON LTD·Filed 2000·Granted Feb 5, 2002·28 cites·12 claims
- 0378US5536320AProcessing apparatusTOKYO ELECTRON LTD·Filed 1994·Granted Jul 16, 1996·30 cites·14 claims
- 0463US7700156B2Method and apparatus for forming silicon oxide filmTOKYO ELECTRON LTD·Filed 2004·Granted Apr 20, 2010·10 cites·14 claims
- 0561US6156121AWafer boat and film formation methodTOKYO ELECTRON LTD·Filed 1997·Granted Dec 5, 2000·24 cites·8 claims
- 0655US6925731B2Thin film forming apparatus cleaning methodTOKYO ELECTRON LTD·Filed 2002·Granted Aug 9, 2005·7 cites·22 claims
- 0748US2009242128A1Plasma processing apparatus and methodTOKYO ELECTRON LTD·Filed 2009·Application pending·0 cites
- 0838US2012247511A1Method for cleaning thin film forming apparatus, thin film forming method, and thin film forming apparatusOKADA MITSUHIRO·Filed 2012·Application pending·0 cites
- 0938US2010218786A1Cleaning method of plasma processing apparatus and storage mediumTOKYO ELECTRON LTD·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →