Inventor · disambiguated record
Rahul Sharangapani
Also filed as: SHARANGAPANI RAHUL
1 granted patent·1 pending application·49 citations·filing 2005–2007
51Inventor score
Technology areasC23C
Top patents by PatentIndex Score
2 records- 0195US7794544B2Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD systemAPPLIED MATERIALS INC·Filed 2007·Granted Sep 14, 2010·49 cites·14 claims
- 0256US2005252449A1Control of gas flow and delivery to suppress the formation of particles in an MOCVD/ALD systemNGUYEN SON T·Filed 2005·Application pending·0 cites
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