Inventor · disambiguated record
Lynda C. Mantalas
Also filed as: MANTALAS LYNDA C
6 granted patents·541 citations·filing 2000–2007
89Inventor score
Top patents by PatentIndex Score
6 records- 0197US7655482B2Chemical mechanical polishing test structures and methods for inspecting the sameKLA TENCOR·Filed 2007·Granted Feb 2, 2010·91 cites·10 claims
- 0295US6509197B1Inspectable buried test structures and methods for inspecting the sameKLA TENCOR CORP·Filed 2000·Granted Jan 21, 2003·146 cites·24 claims
- 0394US6576923B2Inspectable buried test structures and methods for inspecting the sameKLA TENCOR CORP·Filed 2002·Granted Jun 10, 2003·117 cites·13 claims
- 0492US6921672B2Test structures and methods for inspection of semiconductor integrated circuitsKLA TENCOR TECH CORP·Filed 2003·Granted Jul 26, 2005·59 cites·12 claims
- 0592US6528818B1Test structures and methods for inspection of semiconductor integrated circuitsKLA TENCOR·Filed 2000·Granted Mar 4, 2003·60 cites·19 claims
- 0691US7179661B1Chemical mechanical polishing test structures and methods for inspecting the sameKLA TENCOR·Filed 2000·Granted Feb 20, 2007·68 cites·14 claims
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