Inventor · disambiguated record
Heyun Yin
Also filed as: YIN HEYUN
6 granted patents·1 pending application·27 citations·filing 2008–2016
80Inventor score
Files withPAPASOULIOTIS GEORGE D3VARIAN SEMICONDUCTOR EQUIPMENT3VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1
Top patents by PatentIndex Score
7 records- 0188US7863194B2Implantation of multiple species to address copper reliabilityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2010·Granted Jan 4, 2011·9 cites·8 claims
- 0285US8202792B2Method of processing a substrate having a non-planar surfacePAPASOULIOTIS GEORGE D·Filed 2010·Granted Jun 19, 2012·7 cites·4 claims
- 0374US7737013B2Implantation of multiple species to address copper reliabilityVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Granted Jun 15, 2010·5 cites·10 claims
- 0473US8679960B2Technique for processing a substrate having a non-planar surfacePAPASOULIOTIS GEORGE D·Filed 2010·Granted Mar 25, 2014·3 cites·21 claims
- 0570US8507372B2Method for processing a substrate having a non-planar substrate surfacePAPASOULIOTIS GEORGE D·Filed 2012·Granted Aug 13, 2013·2 cites·17 claims
- 0668US10002764B1Sputter etch material selectivityVARIAN SEMICONDUCTOR EQUIPMENT ASS INC·Filed 2016·Granted Jun 19, 2018·1 cites·19 claims
- 0745US2010048018A1Doped Layers for Reducing ElectromigrationVARIAN SEMICONDUCTOR EQUIPMENT·Filed 2008·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →