Inventor · disambiguated record
Hikaru Adachi
Also filed as: ADACHI HIKARU
6 granted patents·3 pending applications·31 citations·filing 2002–2013
80Inventor score
Top patents by PatentIndex Score
9 records- 0184US7723241B2Plasma processing method and computer storage mediumTOKYO ELECTRON LTD·Filed 2006·Granted May 25, 2010·8 cites·8 claims
- 0281US7897518B2Plasma processing method and computer storage mediumTOKYO ELECTRON LTD·Filed 2010·Granted Mar 1, 2011·4 cites·7 claims
- 0375US7910495B2Plasma oxidizing method, plasma processing apparatus, and storage mediumTOKYO ELECTRON LTD·Filed 2007·Granted Mar 22, 2011·5 cites·12 claims
- 0474US7226524B2Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2002·Granted Jun 5, 2007·12 cites·12 claims
- 0562US9702913B2Acquisition method for S-parameters in microwave introduction modules, and malfunction detection methodTOKYO ELECTRON LTD·Filed 2013·Granted Jul 11, 2017·2 cites·12 claims
- 0651US2011114021A1Planar antenna member and plasma processing apparatus including the sameUEDA ATSUSHI·Filed 2009·Application pending·0 cites
- 0748US8183165B2Plasma processing methodMATSUYAMA SEIJI·Filed 2011·Granted May 22, 2012·0 cites·9 claims
- 0848US2010307684A1Plasma processing apparatusTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 0935US2012180953A1Plasma processing apparatus and wave retardation plate used thereinOZAKI SHIGENORI·Filed 2010·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →