Inventor · disambiguated record
N. William Parker
Also filed as: PARKER N W · PARKER N WILLIAM
49 granted patents·6 pending applications·1,251 citations·filing 1992–2018
98Inventor score
Top patents by PatentIndex Score
55 records- 0198US6844550B1Multi-beam multi-column electron beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2003·Granted Jan 18, 2005·142 cites·17 claims
- 0296US6617587B2Electron optics for multi-beam electron beam lithography toolMULTIBEAM SYSTEMS INC·Filed 2002·Granted Sep 9, 2003·104 cites·6 claims
- 0396US5429070AHigh density plasma deposition and etching apparatusPLASMA & MATERIALS TECH·Filed 1992·Granted Jul 4, 1995·277 cites·13 claims
- 0494US9934930B2High aspect ratio x-ray targets and uses of sameFEI CO·Filed 2015·Granted Apr 3, 2018·19 cites·11 claims
- 0594US8314410B2Combination laser and charged particle beam systemSTRAW MARCUS·Filed 2011·Granted Nov 20, 2012·22 cites·35 claims
- 0694US7435956B2Apparatus and method for inspection and testing of flat panel display substratesMULTIBEAM SYSTEMS INC·Filed 2005·Granted Oct 14, 2008·23 cites·28 claims
- 0794US7227142B2Dual detector optics for simultaneous collection of secondary and backscattered electronsMULTIBEAM SYSTEMS INC·Filed 2005·Granted Jun 5, 2007·21 cites·22 claims
- 0893US8319181B2System and method for localization of large numbers of fluorescent markers in biological samplesPARKER N WILLIAM·Filed 2011·Granted Nov 27, 2012·13 cites·27 claims
- 0993US7928404B2Variable-ratio double-deflection beam blankerMULTIBEAM CORP·Filed 2008·Granted Apr 19, 2011·18 cites·14 claims
- 1093US7786454B2Optics for generation of high current density patterned charged particle beamsTOKYO ELECTRON LTD·Filed 2008·Granted Aug 31, 2010·15 cites·11 claims
- 1193US6977375B2Multi-beam multi-column electron beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2001·Granted Dec 20, 2005·47 cites·29 claims
- 1293US6734428B2Multi-beam multi-column electron beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2002·Granted May 11, 2004·51 cites·19 claims
- 1393US5421891AHigh density plasma deposition and etching apparatusPLASMA & MATERIALS TECH·Filed 1992·Granted Jun 6, 1995·130 cites·17 claims
- 1492US9040909B2System and method for simultaneous detection of secondary electrons and light in a charged particle beam systemFEI CO·Filed 2012·Granted May 26, 2015·10 cites·19 claims
- 1591US10366860B2High aspect ratio X-ray targets and uses of sameFEI CO·Filed 2018·Granted Jul 30, 2019·5 cites·21 claims
- 1691US8678049B2Method and structure for prevention of incorrect fueling operations for diesel-powered vehiclesROYS CURTIS·Filed 2011·Granted Mar 25, 2014·14 cites·17 claims
- 1791US8283629B1Aberration-corrected wien ExB mass filter with removal of neutrals from the BeamTUGGLE DAVID·Filed 2011·Granted Oct 9, 2012·18 cites·10 claims
- 1890US7456402B2Detector optics for multiple electron beam test systemMULTIBEAM SYSTEMS INC·Filed 2006·Granted Nov 25, 2008·15 cites·25 claims
- 1990US6777675B2Detector optics for electron beam inspection systemMULTIBEAM·Filed 2002·Granted Aug 17, 2004·55 cites·19 claims
- 2089US7941237B2Flat panel display substrate testing systemMULTIBEAM CORP·Filed 2006·Granted May 10, 2011·13 cites·27 claims
- 2189US7462848B2Optics for generation of high current density patterned charged particle beamsMULTIBEAM SYSTEMS INC·Filed 2004·Granted Dec 9, 2008·27 cites·44 claims
- 2288US6943351B2Multi-column charged particle optics assemblyMULTIBEAM SYSTEMS INC·Filed 2004·Granted Sep 13, 2005·43 cites·20 claims
- 2387US8294093B1Wide aperature wien ExB mass filterTUGGLE DAVID·Filed 2011·Granted Oct 23, 2012·10 cites·17 claims
- 2487US8242457B2Charged particle optics with azimuthally-varying third-order aberrations for generation of shaped beamsPARKER N WILLIAM·Filed 2008·Granted Aug 14, 2012·10 cites·19 claims
- 2586US7122795B2Detector optics for charged particle beam inspection systemMULTIBEAM SYSTEMS INC·Filed 2004·Granted Oct 17, 2006·22 cites·22 claims
- 2685US8642974B2Encapsulation of electrodes in solid media for use in conjunction with fluid high voltage isolationKELLOGG SEAN·Filed 2011·Granted Feb 4, 2014·7 cites·20 claims
- 2785US8633452B2Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion sourceGRAUPERA ANTHONY·Filed 2011·Granted Jan 21, 2014·6 cites·19 claims
- 2885US6872958B2Platform positioning systemMULTIBEAM SYSTEMS INC·Filed 2002·Granted Mar 29, 2005·31 cites·23 claims
- 2983US9224569B2Multi species ion sourceFEI CO·Filed 2013·Granted Dec 29, 2015·4 cites·20 claims
- 3083US9159534B2Methods and structures for rapid switching between different process gases in an inductively-coupled plasma (ICP) ion sourceFEI CO·Filed 2014·Granted Oct 13, 2015·4 cites·20 claims
- 3182US9591735B2High voltage isolation of an inductively coupled plasma ion source with a liquid that is not actively pumpedKELLOGG SEAN·Filed 2012·Granted Mar 7, 2017·5 cites·17 claims
- 3281US9627174B2Multi species ion sourceFEI CO·Filed 2015·Granted Apr 18, 2017·2 cites·20 claims
- 3380US9111715B2Charged particle energy filterPARKER N WILLIAM·Filed 2012·Granted Aug 18, 2015·8 cites·28 claims
- 3474US8137048B2Wafer processing system with dual wafer robots capable of asynchronous motionCHIDAMBARAM MAHENDRAN·Filed 2007·Granted Mar 20, 2012·9 cites·24 claims
- 3573US6738506B2Image processing system for multi-beam inspectionMULTIBEAM SYSTEMS INC·Filed 2002·Granted May 18, 2004·24 cites·30 claims
- 3667US9972474B2Electron microscope with multiple types of integrated x-ray detectors arranged in an arrayFEI CO·Filed 2016·Granted May 15, 2018·1 cites·19 claims
- 3767US6316164B1Proximity effect correction method through uniform removal of fraction of interior pixelsFiled 2000·Granted Nov 13, 2001·7 cites·5 claims
- 3862US9733164B2Lamella creation method and device using fixed-angle beam and rotating sample stageWELLS ANDREW B·Filed 2012·Granted Aug 15, 2017·2 cites·18 claims
- 3959US9767984B2Chicane blanker assemblies for charged particle beam systems and methods of using the sameFEI CO·Filed 2014·Granted Sep 19, 2017·1 cites·11 claims
- 4058US8987678B2Encapsulation of electrodes in solid mediaKELLOGG SEAN·Filed 2012·Granted Mar 24, 2015·1 cites·25 claims
- 4157US9494516B2System and method for simultaneous detection of secondary electrons and light in a charged particle beam systemFEI CO·Filed 2015·Granted Nov 15, 2016·0 cites·20 claims
- 4257US5637951AElectron source for multibeam electron lithography systemION DIAGNOSTICS INC·Filed 1995·Granted Jun 10, 1997·15 cites·34 claims
- 4354US9349564B2Charged-particle lens that transmits emissions from sampleFEI CO·Filed 2014·Granted May 24, 2016·0 cites·23 claims
- 4453US9478390B2Integrated light optics and gas delivery in a charged particle lensFEI CO·Filed 2014·Granted Oct 25, 2016·0 cites·23 claims
- 4553US9053895B2System for attachment of an electrode into a plasma sourceKELLOGG SEAN·Filed 2011·Granted Jun 9, 2015·0 cites·22 claims
- 4651US9204036B2Image-enhancing spotlight mode for digital microscopyFEI CO·Filed 2013·Granted Dec 1, 2015·0 cites·24 claims
- 4751US2016032281A1Functionalized grids for locating and imaging biological specimens and methods of using the sameFEI CO·Filed 2014·Application pending·0 cites
- 4851US2009008579A1Electron beam lithography apparatus and design method of patterned beam-defining apertureTOKYO ELECTRON LTD·Filed 2008·Application pending·0 cites
- 4950US8710453B2Charged particle source with multiple selectable particle emittersPARKER N WILLIAM·Filed 2011·Granted Apr 29, 2014·0 cites·20 claims
- 5049US8907296B2Charged particle beam system apertureFEI CO·Filed 2012·Granted Dec 9, 2014·0 cites·21 claims
Showing the top 50 of 55 patent records by PatentIndex Score.
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