Inventor · disambiguated record
Yuhei Sumiyoshi
Also filed as: SUMIYOSHI YUHEI
15 granted patents·1 pending application·169 citations·filing 1995–2023
91Inventor score
Top patents by PatentIndex Score
16 records- 0196US7215410B2Exposure apparatusCANON KK·Filed 2005·Granted May 8, 2007·49 cites·8 claims
- 0290US7006194B2Projection optical system, exposure apparatus and method using the sameCANON KK·Filed 2003·Granted Feb 28, 2006·25 cites·9 claims
- 0388US10545413B2Evaluation method, exposure method, and method for manufacturing an articleCANON KK·Filed 2019·Granted Jan 28, 2020·5 cites·9 claims
- 0483US6014455AProjection exposure apparatus and device manufacturing methodCANON KK·Filed 1995·Granted Jan 11, 2000·55 cites·13 claims
- 0575US12105430B2Exposure apparatus, exposure method, and manufacturing method for productCANON KK·Filed 2023·Granted Oct 1, 2024·0 cites·17 claims
- 0672US8760618B2Projection optical system, exposure apparatus and device manufacturing methodSUMIYOSHI YUHEI·Filed 2010·Granted Jun 24, 2014·3 cites·26 claims
- 0769US11835863B2Exposure apparatus, exposure method, and manufacturing method for productCANON KK·Filed 2022·Granted Dec 5, 2023·0 cites·16 claims
- 0869US7408620B2Exposure apparatusCANON KK·Filed 2007·Granted Aug 5, 2008·2 cites·5 claims
- 0968US6256086B1Projection exposure apparatus, and device manufacturing methodCANON KK·Filed 1999·Granted Jul 3, 2001·29 cites·11 claims
- 1064US11656554B2Exposure apparatus, exposure method, and method of manufacturing articleCANON KK·Filed 2020·Granted May 23, 2023·0 cites·18 claims
- 1162US7403262B2Projection optical system and exposure apparatus having the sameCANON KK·Filed 2005·Granted Jul 22, 2008·1 cites·16 claims
- 1251US7365826B2Projection optical system, exposure apparatus and method using the sameCANON KK·Filed 2005·Granted Apr 29, 2008·0 cites·5 claims
- 1343US10191394B2Distortion detection method, exposure apparatus, exposure method, and device manufacturing methodCANON KK·Filed 2016·Granted Jan 29, 2019·0 cites·20 claims
- 1438US8477286B2Projection optical system, exposure apparatus, and device manufacturing methodSUMIYOSHI YUHEI·Filed 2010·Granted Jul 2, 2013·0 cites·12 claims
- 1538US8437004B2Detection apparatusSUMIYOSHI YUHEI·Filed 2010·Granted May 7, 2013·0 cites·13 claims
- 1634US2014168623A1Exposure apparatus, exposure method, and method of manufacturing deviceCANON KK·Filed 2013·Application pending·0 cites
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Identity basis: PatentsView inventor disambiguation (2025Q4-odp release). How scoring works →